Issued Patents All Time
Showing 26–50 of 57 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10872777 | Self-aligned double patterning (SADP) method | Jui-Yu Pan, Kuo-Chyuan Tzeng, Ying Chen | 2020-12-22 |
| 10870574 | Method and apparatus for reducing in-process and in-use stiction for MEMS devices | Chang-Ming Wu, Shih-Chang Liu, Yuan-Chih Hsieh | 2020-12-22 |
| 10784091 | Process and related device for removing by-product on semiconductor processing chamber sidewalls | Jing Liao, Chang-Ming Wu | 2020-09-22 |
| 10683204 | Semiconductor arrangement and formation thereof | Chung-Yen Chou, Chia-Shiung Tsai, Ru-Liang Lee | 2020-06-16 |
| 10562763 | Fence structure to prevent stiction in a MEMS motion sensor | Chang-Ming Wu | 2020-02-18 |
| 10526199 | High efficiency getter design in vacuum MEMS device | Ting-Jung Chen | 2020-01-07 |
| 10522429 | Method of manufacturing semiconductor device | Chang-Ming Wu | 2019-12-31 |
| 10483119 | Self-aligned double patterning (SADP) method | Jui-Yu Pan, Kuo-Chyuan Tzeng, Ying Chen | 2019-11-19 |
| 10322930 | Semiconductor arrangement and formation thereof | Chung-Yen Chou, Chia-Shiung Tsai, Ru-Liang Lee | 2019-06-18 |
| 10273143 | Method and apparatus for reducing in-process and in-use stiction for MEMS devices | Chang-Ming Wu, Shih-Chang Liu, Yuan-Chih Hsieh | 2019-04-30 |
| 10269637 | Semiconductor structure and fabricating method thereof | Lung Yuan Pan, Chung-Yen Chou | 2019-04-23 |
| 10163692 | Structure and formation method of interconnection structure of semiconductor device structure | Chang-Ming Wu | 2018-12-25 |
| 10147829 | Dielectric sidewall structure for quality improvement in Ge and SiGe devices | Chih-Ming Chen, Ming Chyi Liu, Po-Chun Liu | 2018-12-04 |
| 10048220 | Biosensor field effect transistor having specific well structure and method of forming the same | Shih-Wei Lin, Chang-Ming Wu, Shih-Chang Liu | 2018-08-14 |
| 10037893 | Method and apparatus for etching wafer with etching gas | Chang-Ming Wu | 2018-07-31 |
| 10029910 | Formation method of MEMS device structure with cavities | Chang-Ming Wu | 2018-07-24 |
| 9975757 | Wafer Level Hermetic Seal Process for microelectromechanical systems (MEMS) devices | Chung-Yen Chou, Shih-Chang Liu, Yuan-Chih Hsieh | 2018-05-22 |
| 9944516 | High aspect ratio etch without upper widening | Chung-Yen Chou, Chia-Shiung Tsai, Ru-Liang Lee | 2018-04-17 |
| 9878899 | Method and apparatus for reducing in-process and in-use stiction for MEMS devices | Chang-Ming Wu, Shih-Chang Liu, Yuan-Chih Hsieh | 2018-01-30 |
| 9796584 | Method for fabricating a micro-well of a biosensor | Che-Ming Chang, Chih-Jen Chan, Chung-Yen Chou, Shih-Wei Lin, Yuan-Chih Hsieh | 2017-10-24 |
| 9776852 | Method for controlling surface roughness in MEMS structure | Yuan-Chih Hsieh, Hung-Hua Lin | 2017-10-03 |
| 9771256 | Micro electro mechanical system (MEMS) device having via extending through plug | Chung-Yen Chou, Chia-Shiung Tsai, Ru-Liang Lee | 2017-09-26 |
| 9714914 | CMOS compatible biofet | Che-Ming Chang, Chung-Yen Chou, Yuan-Chih Hsieh | 2017-07-25 |
| 9637378 | Cup-like getter scheme | Chih-Jen Chan, Shih-Wei Lin, Che-Ming Chang, Chung-Yen Chou, Yuan-Chih Hsieh | 2017-05-02 |
| 9606081 | Method for fabricating a micro-well of a biosensor | Che-Ming Chang, Chih-Jen Chan, Chung-Yen Chou, Shih-Wei Lin, Yuan-Chih Hsieh | 2017-03-28 |