Issued Patents All Time
Showing 326–350 of 351 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7268357 | Immersion lithography apparatus and method | Jen-Chien Shih | 2007-09-11 |
| 7224427 | Megasonic immersion lithography exposure apparatus and method | Ching-Yu Chang, Chien-Hung Lin, David Lu, Horng-Huei Tseng, Burn Jeng Lin | 2007-05-29 |
| 7220680 | Method for photolithography in semiconductor manufacturing | — | 2007-05-22 |
| 7202148 | Method utilizing compensation features in semiconductor processing | Kuei-Shun Chen, Chih-Cheng Chiu | 2007-04-10 |
| 7199018 | Plasma assisted pre-planarization process | Yung-Tai Hung, Chun-Fu Chen, Yun-Chi Yang, Chen Liao | 2007-04-03 |
| 7180572 | Immersion optical projection system | Jen-Chieh Shih, Burn Jeng Lin, Tsai-Sheng Gau, Ru-Gun Liu, Chun-Kuang Chen +1 more | 2007-02-20 |
| 7162071 | Progressive self-learning defect review and classification method | Chang-Cheng Hung, Tyng-Hao Hsu, Chuan-Yuan Lin, Shin-Ying Chen | 2007-01-09 |
| 7035449 | Method for applying a defect finder mark to a backend photomask making process | Chang-Cheng Hung, Chuan-Yuan Lin, Tyng-Hao Hsu, Shu-Chun Lin | 2006-04-25 |
| 7005235 | Method and systems to print contact hole patterns | — | 2006-02-28 |
| 6982135 | Pattern compensation for stitching | Chung-Hsing Chang, Chien-Hung Lin, Burn Jeng Lin, Chia-Hui Lin, Chih-Cheng Chin +3 more | 2006-01-03 |
| 6968251 | Defect analysis sampling control | Ching-Cheng Shih | 2005-11-22 |
| 6923645 | Gas mixing device | Teng-Mao Chiu | 2005-08-02 |
| 6911374 | Fabrication method for shallow trench isolation region | Chin-Wei Liao, Hsueh-Hao Shih, Kuang-Chao Chen | 2005-06-28 |
| 6875624 | Combined E-beam and optical exposure semiconductor lithography | — | 2005-04-05 |
| 6858353 | Increased-contrast film for high-transmittance attenuated phase-shaft masks | Chia-Yang Chang, Tyng-Hao Hsu, Chang-Cheng Hung | 2005-02-22 |
| 6721939 | Electron beam shot linearity monitoring | Wen-Chuan Wang, Tyng-Hao Hsu | 2004-04-13 |
| 6713365 | Methods for filling shallow trench isolations having high aspect ratios | Lee-Jen Chen | 2004-03-30 |
| 6677231 | Method for increasing adhesion ability of dielectric material in semiconductor | Cheng-Yuan Tsai, Ming-Sheng Yang | 2004-01-13 |
| 6653029 | Dual-focused ion beams for semiconductor image scanning and mask repair | Chuan-Yuan Lin, Chang-Cheng Hung, Chih-Cheng Chin | 2003-11-25 |
| 6638879 | Method for forming nitride spacer by using atomic layer deposition | Jung-Yu Hsieh | 2003-10-28 |
| 6429115 | Method of manufacturing multilevel interconnects including performing a surface treatment to form a hydrophilic surface layer | Cheng-Yuan Tsai, Ming-Sheng Yang | 2002-08-06 |
| 6428938 | Phase-shift mask for printing high-resolution images and a method of fabrication | Shy-Jay Lin, Sheng-Chi Chin, Wei-Zen Chou | 2002-08-06 |
| 6365228 | Process for spin-on coating with an organic material having a low dielectric constant | Cheng-Yuan Tsai, Ming-Sheng Yang | 2002-04-02 |
| 6215578 | Electronically switchable off-axis illumination blade for stepper illumination system | — | 2001-04-10 |
| 6121626 | Method and system of exposure with a universal dynamic mask and charge coupled device image feedback control | — | 2000-09-19 |