Issued Patents All Time
Showing 1–19 of 19 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10892265 | Word line structure and method of manufacturing the same | Chi-Min Chen, Tuung Luoh, Ta-Hung Yang, Kuang-Chao Chen | 2021-01-12 |
| 10388664 | Integrated circuit device with layered trench conductors | Yukai Huang, Chun-Ling Chiang, Chun-Min Cheng, Tuung Luoh, Ling Yang +2 more | 2019-08-20 |
| 9685373 | Conductive plug and method of forming the same | Meng-Tsung Ko, Chin-Ta Su | 2017-06-20 |
| 9431287 | Chemical mechanical planarization process and structures | Yi-Sheng Cheng, Chun-Fu Chen, Chin-Ta Su | 2016-08-30 |
| 9252102 | Semiconductor structure and method for manufacturing the same | Bing-Lung Yu, Chin-Tsan Yeh, Chin-Ta Su | 2016-02-02 |
| 9117752 | Kink poly structure for improving random single bit failure | Shing-Ann Luo, Chin-Ta Su, Tahone Yagn | 2015-08-25 |
| 9070634 | Semiconductor device comprising a surface portion implanted with nitrogen and fluorine | Chien-Lan Chiu, Chin-Ta Su | 2015-06-30 |
| 9045838 | System and method for semiconductor wafer processing with side/bevel protection | Meng-Tsung Ko, Chin-Ta Su | 2015-06-02 |
| 8445982 | Method of forming a semiconductor device | Chin-Tsan Yeh, Chun-Fu Chen, Chin-Ta Su | 2013-05-21 |
| 8288280 | Conductor removal process | Chin-Tsan Yeh, Chin-Ta Su, Ling-Wu Yang, Tung-Han Chuang | 2012-10-16 |
| 8047899 | Pad and method for chemical mechanical polishing | Chun-Fu Chen, Chin-Ta Su, Kuang-Chao Chen | 2011-11-01 |
| 7786023 | Metal pad formation method and metal pad structure using the same | Jen-Chuan Pan, Chin-Ta Su, Ta-Hung Yang | 2010-08-31 |
| 7544618 | Two-step chemical mechanical polishing process | Chun-Fu Chen, Chi-Tung Huang, Yun-Chi Yang | 2009-06-09 |
| 7491621 | Method of forming isolation structures in a semiconductor manufacturing process | Chun-Fu Chen, Chi-Tung Huang, Chen Liao | 2009-02-17 |
| 7361601 | Chemical mechanical polish process and method for improving accuracy of determining polish endpoint thereof | Chun-Fu Chen, Chi-Tung Huang, Chun-Chung Huang | 2008-04-22 |
| 7199018 | Plasma assisted pre-planarization process | Chun-Fu Chen, Yun-Chi Yang, Chin-Hsiang Lin, Chen Liao | 2007-04-03 |
| 6824452 | Polishing pad and process of chemical mechanical use thereof | Yuhturng Liu, Hsueh-Hao Shih, Kuang-Chao Chen | 2004-11-30 |
| 6750117 | Shallow trench isolation process | Lee-Jen Chen | 2004-06-15 |
| 6565705 | Wafer carrier used for chemical mechanic polishing | Chi-Tung Huang | 2003-05-20 |