Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7037628 | Method of a floating pattern loading system in mask dry-etching critical dimension control | Fei-Gwo Tsai, Zong-Xian Tsai | 2006-05-02 |
| 6872507 | Radiation correction method for electron beam lithography | San-De Tzu, Ching-Shiun Chiu, Chia-Fang Wu | 2005-03-29 |
| 6428938 | Phase-shift mask for printing high-resolution images and a method of fabrication | Chin-Hsiang Lin, Shy-Jay Lin, Sheng-Chi Chin | 2002-08-06 |
| 6361911 | Using a dummy frame pattern to improve CD control of VSB E-beam exposure system and the proximity effect of laser beam exposure system and Gaussian E-beam exposure system | Fei-Gwo Tsai | 2002-03-26 |
| 6294295 | Variable transmittance phase shifter to compensate for side lobe problem on rim type attenuating phase shifting masks | Chia-Hui Lin, San-De Tzu | 2001-09-25 |
| 6277528 | Method to change transmittance of attenuated phase-shifting masks | San-De Tzu | 2001-08-21 |
| 6261725 | Phase angle modulation of PSM by chemical treatment method | San-De Tzu, Ching-Shiun Chiu | 2001-07-17 |
| 6251547 | Simplified process for making an outrigger type phase shift mask | San-De Tzu, Chia-Hui Lin | 2001-06-26 |
| 6190809 | Cost-effective method to fabricate a combined attenuated-alternating phase shift mask | San-De Tzu, Ching-Shiun Chiu | 2001-02-20 |