Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7653372 | Communication device, mixer and method thereof | Wei Yang | 2010-01-26 |
| 6872507 | Radiation correction method for electron beam lithography | San-De Tzu, Wei-Zen Chou, Chia-Fang Wu | 2005-03-29 |
| 6432588 | Method of forming an improved attenuated phase-shifting photomask | San-De Tzu | 2002-08-13 |
| 6361904 | Method for repairing the shifter layer of an alternating phase shift mask | — | 2002-03-26 |
| 6261725 | Phase angle modulation of PSM by chemical treatment method | San-De Tzu, Wei-Zen Chou | 2001-07-17 |
| 6190809 | Cost-effective method to fabricate a combined attenuated-alternating phase shift mask | San-De Tzu, Wei-Zen Chou | 2001-02-20 |
| 6174801 | E-beam direct writing to pattern step profiles of dielectric layers applied to fill poly via with poly line, contact with metal line, and metal via with metal line | San-De Tzu, Chia-Hui Lin | 2001-01-16 |