Issued Patents All Time
Showing 1–25 of 42 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7445159 | Dual trench alternating phase shift mask fabrication | Ming-Shuo Yen, Chung-Hsing Chana | 2008-11-04 |
| 7434194 | Mask for fabricating semiconductor devices and method for designing the same | — | 2008-10-07 |
| 7033947 | Dual trench alternating phase shift mask fabrication | Ming-Shuo Yen, Chung-Hsing Chang | 2006-04-25 |
| 6872507 | Radiation correction method for electron beam lithography | Ching-Shiun Chiu, Wei-Zen Chou, Chia-Fang Wu | 2005-03-29 |
| 6830853 | Chrome mask dry etching process to reduce loading effect and defects | Sheng-Chi Chin, Chung-Hsing Chang, Hsin-Chang Li | 2004-12-14 |
| 6830702 | Single trench alternating phase shift mask fabrication | Chang-Ming Dai, Chung-Hsing Chang, Chen-Hao Hsieh | 2004-12-14 |
| 6720116 | Process flow and pellicle type for 157 nm mask making | Anthony Yen, Chung-Hsing Chang, Chen-Hao Hsieh | 2004-04-13 |
| 6660653 | Dual trench alternating phase shift mask fabrication | Chang-Ming Dai, Ching-Hsing Chang | 2003-12-09 |
| 6632590 | Enhance the process window of memory cell line/space dense pattern in sub-wavelength process | Tsung-Hou Lee, Chih-Hsiung Lee, Gwo-Yuh Shiau, Ching-Sen Kuo | 2003-10-14 |
| 6631307 | Use of logical operations in place of OPC software | Yi-Hsu Chen | 2003-10-07 |
| 6630408 | Self alignment process to fabricate attenuated shifting mask with chrome border | Ching-Chia Lin | 2003-10-07 |
| 6495297 | Type mask for combining off axis illumination and attenuating phase shifting mask patterns | Chih-Chiang Tu | 2002-12-17 |
| 6432588 | Method of forming an improved attenuated phase-shifting photomask | Ching-Shiun Chiu | 2002-08-13 |
| 6423455 | Method for fabricating a multiple masking layer photomask | — | 2002-07-23 |
| 6403267 | Method for high transmittance attenuated phase-shifting mask fabrication | Wei-Zen Chen | 2002-06-11 |
| 6301698 | Method for creating the sub-resolution phase shifting pattern for outrigger type phase shifting masks | Chia-Hui Lin | 2001-10-09 |
| 6294295 | Variable transmittance phase shifter to compensate for side lobe problem on rim type attenuating phase shifting masks | Chia-Hui Lin, Wei-Zen Chou | 2001-09-25 |
| 6277528 | Method to change transmittance of attenuated phase-shifting masks | Wei-Zen Chou | 2001-08-21 |
| 6261725 | Phase angle modulation of PSM by chemical treatment method | Wei-Zen Chou, Ching-Shiun Chiu | 2001-07-17 |
| 6251547 | Simplified process for making an outrigger type phase shift mask | Chia-Hui Lin, Wei-Zen Chou | 2001-06-26 |
| 6194103 | E-beam double exposure method for manufacturing ASPM mask with chrome border | Chinq-Shiun Chiu | 2001-02-27 |
| 6190809 | Cost-effective method to fabricate a combined attenuated-alternating phase shift mask | Ching-Shiun Chiu, Wei-Zen Chou | 2001-02-20 |
| 6174801 | E-beam direct writing to pattern step profiles of dielectric layers applied to fill poly via with poly line, contact with metal line, and metal via with metal line | Ching-Shiun Chiu, Chia-Hui Lin | 2001-01-16 |
| 6171914 | Synchronized implant process to simplify NLDD/PLDD stage and N+/P+stage into one implant | Ni-Ko Liao | 2001-01-09 |
| 6150058 | Method of making attenuating phase-shifting mask using different exposure doses | Chih-Chiang Tu | 2000-11-21 |