Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7445159 | Dual trench alternating phase shift mask fabrication | San-De Tzu, Chung-Hsing Chana | 2008-11-04 |
| 7033947 | Dual trench alternating phase shift mask fabrication | San-De Tzu, Chung-Hsing Chang | 2006-04-25 |
| 6930323 | Test keys structure for a control monitor wafer | Hsien-Tsong Chen, Woan Tyng Hwang, Yu-Chang Chen, Tien-Tzu Wen, Shion-Feng Chang Chien | 2005-08-16 |
| 6734511 | Auto sensor function chip | Jun Liu, Chiu-Bian Kuo, Chun-Hsiung Peng | 2004-05-11 |
| 6680474 | Semiconductor calibration wafer with no charge effect | Chi-Yao Wang | 2004-01-20 |
| 6642150 | Method for testing for blind hole formed in wafer layer | Chuan-Chieh Huang, Wen-Hsiang Tang, Chiang-Jen Peng, Pei-Hung Chen | 2003-11-04 |
| 6623995 | Optimized monitor method for a metal patterning process | Hsien-Tsong Chen, Woan Tyng Hwang, Yu-Chang Chen, Tien-Tzu Wen, Shion-Feng Chang Chien | 2003-09-23 |
| 6267121 | Process to season and determine condition of a high density plasma etcher | Cheng-Hao Huang, Shih-Fang Chen, Wen-Hsiang Tang, Pei-Hung Chen | 2001-07-31 |
| 5962345 | Method to reduce contact resistance by means of in-situ ICP | Horng-Wen Chen, Pei-Hung Chen | 1999-10-05 |
| 5930664 | Process for preventing corrosion of aluminum bonding pads after passivation/ARC layer etching | Fang-Jen Hsu, Chen-Peng Fan, Chi-Ping Chen | 1999-07-27 |