Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7018928 | Plasma treatment method to reduce silicon erosion over HDI silicon regions | Li-Te Hsu, Chia-Lun Chen, Pin Chia Su | 2006-03-28 |
| 6929713 | In-situ photoresist removal by an attachable chamber with light source | Dian-Hau Chen | 2005-08-16 |
| 6808589 | Wafer transfer robot having wafer blades equipped with sensors | Yu-Sheng Su, Pin Chia Su, WEN-LANG WU | 2004-10-26 |
| 6664194 | Photoexposure method for facilitating photoresist stripping | Dian-Hau Chen, Wei-Kay Chiu | 2003-12-16 |
| 6660528 | Method for monitoring contaminating particles in a chamber | Horng-Wen Chen, Jeng-Fieng Lu | 2003-12-09 |
| 6642150 | Method for testing for blind hole formed in wafer layer | Chuan-Chieh Huang, Wen-Hsiang Tang, Ming-Shuo Yen, Pei-Hung Chen | 2003-11-04 |
| 6500725 | Microelectronic fabrication method providing alignment mark and isolation trench of identical depth | Chien-Chuan Chen, Bin Su, Shu-Huei Suen | 2002-12-31 |
| 6429142 | In-situ photoresist removal by an attachable chamber with light source | Dian-Hau Chen | 2002-08-06 |
| 6251794 | Method and apparatus with heat treatment for stripping photoresist to eliminate post-strip photoresist extrusion defects | Ching-Chung Lin | 2001-06-26 |
| 6103596 | Process for etching a silicon nitride hardmask mask with zero etch bias | — | 2000-08-15 |
| 5840203 | In-situ bake step in plasma ash process to prevent corrosion | — | 1998-11-24 |