Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7015089 | Method to improve etching of resist protective oxide (RPO) to prevent photo-resist peeling | Jyh-Shiou Hsu, Pin-Yi Hsin | 2006-03-21 |
| 6943120 | Method to improve via or contact hole profile using an in-situ polymer deposition and strip procedure | Feng-Yueh Chang, Chi-Lien Lin | 2005-09-13 |
| 6767844 | Plasma chamber equipped with temperature-controlled focus ring and method of operating | — | 2004-07-27 |
| 6642150 | Method for testing for blind hole formed in wafer layer | Wen-Hsiang Tang, Ming-Shuo Yen, Chiang-Jen Peng, Pei-Hung Chen | 2003-11-04 |
| 6566184 | Process to define N/PMOS poly patterns | Zin-Chein Wei, Chih-Hsiung Lee | 2003-05-20 |