Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6642150 | Method for testing for blind hole formed in wafer layer | Chuan-Chieh Huang, Ming-Shuo Yen, Chiang-Jen Peng, Pei-Hung Chen | 2003-11-04 |
| 6562696 | Method for forming an STI feature to avoid acidic etching of trench sidewalls | Jen-Tian Hsu | 2003-05-13 |
| 6267121 | Process to season and determine condition of a high density plasma etcher | Cheng-Hao Huang, Ming-Shuo Yen, Shih-Fang Chen, Pei-Hung Chen | 2001-07-31 |
| 6214739 | Method of metal etching with in-situ plasma cleaning | Cheng-Hao Huang, Pei-Hung Chen | 2001-04-10 |
| 6156485 | Film scheme to solve high aspect ratio metal etch masking layer selectivity and improve photo I-line PR resolution capability in quarter-micron technology | Yi-Fei Wang, Chih-Shen Hung, Cheng-Hao Huang | 2000-12-05 |
| 6063709 | Removal of SOG etchback residue by argon treatment | Kang-Min Kuo, Su-Ying Su, Chi-Ming Wu | 2000-05-16 |