Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| RE40007 | In-situ strip process for polysilicon etching in deep sub-micron technology | Chi-How Wu | 2008-01-22 |
| 6660528 | Method for monitoring contaminating particles in a chamber | Jeng-Fieng Lu, Chiang-Jen Peng | 2003-12-09 |
| 6283131 | In-situ strip process for polysilicon etching in deep sub-micron technology | Chi-How Wu | 2001-09-04 |
| 6254398 | Method for initiating a helium alarm particle detector in a dry etching system prior to initiation of the etching process | — | 2001-07-03 |
| 6214703 | Method to increase wafer utility by implementing deep trench in scribe line | Chen-Yu Chang | 2001-04-10 |
| 5962345 | Method to reduce contact resistance by means of in-situ ICP | Ming-Shuo Yen, Pei-Hung Chen | 1999-10-05 |