Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| RE40007 | In-situ strip process for polysilicon etching in deep sub-micron technology | Horng-Wen Chen | 2008-01-22 |
| 7018929 | Method for reducing a low volatility byproduct from a wafer surface following an etching process | Yei-Ren Chen, Hung-Wen Chen, Zhi-Yong Chang | 2006-03-28 |
| 6283131 | In-situ strip process for polysilicon etching in deep sub-micron technology | Horng-Wen Chen | 2001-09-04 |