Issued Patents All Time
Showing 1–13 of 13 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6908514 | Wafer alignment marks protected by photoresist | Chen-Yu Chang | 2005-06-21 |
| 6664194 | Photoexposure method for facilitating photoresist stripping | Dian-Hau Chen, Chiang-Jen Peng | 2003-12-16 |
| 6575645 | Method and apparatus for improving resist pattern developing | — | 2003-06-10 |
| 6537734 | Method and apparatus for improving resist pattern developing | — | 2003-03-25 |
| 6355397 | Method and apparatus for improving resist pattern developing | — | 2002-03-12 |
| 6197481 | Wafer alignment marks protected by photoresist | Chen-Yu Chang | 2001-03-06 |
| 6137088 | Baking of photoresist on wafers | Chao-Chen Chen | 2000-10-24 |
| 6019844 | Acoustic wave enhanced spin coater | — | 2000-02-01 |
| 6010255 | Acoustic wave enhanced developer | — | 2000-01-04 |
| 5876875 | Acoustic wave enhanced developer | — | 1999-03-02 |
| 5858475 | Acoustic wave enhanced spin coating method | — | 1999-01-12 |
| 5849582 | Baking of photoresist on wafers | Chao-Chen Chen | 1998-12-15 |
| 5838162 | Test apparatus and method for testing integrated circuit modules having visual display | Wen-Szu Chung | 1998-11-17 |