Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6630408 | Self alignment process to fabricate attenuated shifting mask with chrome border | San-De Tzu | 2003-10-07 |
| 6007324 | Double layer method for fabricating a rim type attenuating phase shifting mask | San-De Tzu, Shy-Jay Lin | 1999-12-28 |
| 5888678 | Mask and simplified method of forming a mask integrating attenuating phase shifting mask patterns and binary mask patterns on the same mask substrate | San-De Tzu, Chia-Hui Lin, Wen-Hong Huang | 1999-03-30 |