Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6660436 | OPC-like repair method for attenuated phase shift masks | Same-Ting Chen, Wen-Reng Huang | 2003-12-09 |
| 5897979 | Method of forming multiple layer attenuating phase shifting masks | San-De Tzu, Jia Wang, Chin-Chiang Tu | 1999-04-27 |
| 5888678 | Mask and simplified method of forming a mask integrating attenuating phase shifting mask patterns and binary mask patterns on the same mask substrate | San-De Tzu, Chia-Hui Lin, Ching-Chia Lin | 1999-03-30 |
| 5792578 | Method of forming multiple layer attenuating phase shifting masks | San-De Tzu, Jia Wang, Chih-Chiang Tu | 1998-08-11 |
| 5783337 | Process to fabricate a double layer attenuated phase shift mask (APSM) with chrome border | San-De Tzu, Chih-Chiang Tu, Chia-Hui Lin | 1998-07-21 |