Issued Patents All Time
Showing 76–100 of 116 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10849214 | Method of operating semiconductor apparatus and semiconductor apparatus | Po-Ming SHIH | 2020-11-24 |
| 10845717 | Lens control for lithography tools | Yueh-Lin Yang | 2020-11-24 |
| 10811300 | Wafer table with dynamic support pins | Min-Cheng Wu | 2020-10-20 |
| 10792697 | Drippage prevention system and method of operating same | Chien-Hung Wang, Chun-Chih Lin, Yung-Yao Lee, Wei Chang Cheng | 2020-10-06 |
| 10775700 | Lithography system and method for exposing wafer | Min-Cheng Wu | 2020-09-15 |
| 10775706 | Lithography apparatus and method using the same | Min-Cheng Wu | 2020-09-15 |
| 10777121 | Power circuit, gate driver and related operation control method for multi-source display system | Chang-Lung Wu, Jen-Chun Peng, Huan Liao, Kuo-Tung Hsu, Wei-Jen Chang | 2020-09-15 |
| 10768534 | Photolithography apparatus and method and method for handling wafer | Po-Ming SHIH | 2020-09-08 |
| 10770327 | System and method for correcting non-ideal wafer topography | Cheng-Mu Lin, Yi-Ming Dai, Yueh-Lin Yang | 2020-09-08 |
| 10710287 | Injection molding method and mold mechanism | Ray-Long Tsai, Yan-Hua Li, Chien-Jung Hsu, Chun-Hao Hu, Chia-Yu Yen | 2020-07-14 |
| 10678133 | Method for forming photoresist layer | Wei Chang Cheng | 2020-06-09 |
| 10678146 | Particle removal from wafer table and photomask | Min-Cheng Wu | 2020-06-09 |
| 10670540 | Photolithography method and photolithography system | Wei Chang Cheng | 2020-06-02 |
| 10651075 | Wafer table with dynamic support pins | Min-Cheng Wu | 2020-05-12 |
| 10636702 | Conductive interconnect structures in integrated circuits | Jung-Tang Wu, Shao Tzu Lien, Szu-Hua Wu, Liang-Yueh Ou Yang, Chin-Szu Lee | 2020-04-28 |
| 10627727 | Lens control for lithography tools | Yueh-Lin Yang | 2020-04-21 |
| 10618085 | Apparatus and methods for exhaust cleaning | Wei Chang Cheng, Cheng-Kuang Chen | 2020-04-14 |
| 10613444 | Semiconductor apparatus and method of operating the same | Min-Cheng Wu | 2020-04-07 |
| 10534272 | Method of fabricating reticle | Hsueh-Yi Chung, Yung-Cheng Chen, Fei-Gwo Tsai, Shih-Chi Fu, Wei-Ti Hsu +4 more | 2020-01-14 |
| 10522385 | Wafer table with dynamic support pins | Min-Cheng Wu | 2019-12-31 |
| 10514607 | Radiation source supply system for lithographic tools | Yueh-Lin Yang | 2019-12-24 |
| 10509321 | Temperature controlling apparatus and method for forming coating layer | Wei Chang Cheng | 2019-12-17 |
| 10473021 | Exhaust system and method of using | Wei Chang Cheng, Ping-Hsu Chen, T. S. Lo, Yung-Yao Lee | 2019-11-12 |
| 10464032 | System and method for providing deionized water with dynamic electrical resistivity | Wei Chang Cheng, Chien-Hung Wang | 2019-11-05 |
| 10073354 | Exposure method of wafer substrate, manufacturing method of semiconductor device, and exposure tool | Hsueh-Yi Chung, Yung-Cheng Chen, Fei-Gwo Tsai, Shih-Chi Fu, Wei-Ti Hsu +4 more | 2018-09-11 |