Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12411419 | Droplet splash control for extreme ultraviolet photolithography | Chi-Hung Liao | 2025-09-09 |
| 12287590 | Reduce mask defect impact by contamination decompose | Chi-Hung Liao | 2025-04-29 |
| 12025922 | Methods and apparatus for reducing hydrogen permeation from lithographic tool | Chi-Hung Liao | 2024-07-02 |
| 11940738 | Droplet splash control for extreme ultra violet photolithography | Chi-Hung Liao | 2024-03-26 |
| 11687012 | Reduce mask defect impact by contamination decompose | Chi-Hung Liao | 2023-06-27 |
| 11561482 | Methods and apparatus for reducing hydrogen permeation from lithographic tool | Chi-Hung Liao | 2023-01-24 |
| 11229111 | Method of operating semiconductor apparatus and semiconductor apparatus | Chi-Hung Liao | 2022-01-18 |
| 11187997 | Photolithography apparatus and method for handling wafer | Chi-Hung Liao | 2021-11-30 |
| 10849214 | Method of operating semiconductor apparatus and semiconductor apparatus | Chi-Hung Liao | 2020-11-24 |
| 10768534 | Photolithography apparatus and method and method for handling wafer | Chi-Hung Liao | 2020-09-08 |