Issued Patents All Time
Showing 1–25 of 27 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12025923 | Lithography system and operation method thereof | Chi-Hung Liao | 2024-07-02 |
| 12020963 | Method of performing a substrate detection process | Chi-Hung Liao | 2024-06-25 |
| 12007691 | Substrate measuring device and a method of using the same | Chi-Hung Liao | 2024-06-11 |
| 11923187 | Cleaning method and apparatus | Chi-Hung Liao | 2024-03-05 |
| 11923231 | Substrate table with vacuum channels grid | Chi-Hung Liao | 2024-03-05 |
| 11899378 | Lithography system and operation method thereof | Chi-Hung Liao | 2024-02-13 |
| 11852980 | Techniques for correction of aberrations | Ching-Ju HUANG | 2023-12-26 |
| 11562898 | Cleaning method and apparatus | Chi-Hung Liao | 2023-01-24 |
| 11550233 | Lithography system and operation method thereof | Chi-Hung Liao | 2023-01-10 |
| 11409201 | Substrate measuring device and a method of using the same | Chi-Hung Liao | 2022-08-09 |
| 11409200 | Substrate measuring device and a method of using the same | Chi-Hung Liao | 2022-08-09 |
| 11302566 | Wafer table with dynamic support pins | Chi-Hung Liao | 2022-04-12 |
| 11269261 | Particle removal from wafer table and photomask | Chi-Hung Liao | 2022-03-08 |
| 11217475 | Wafer table with dynamic support pins | Chi-Hung Liao | 2022-01-04 |
| 11092892 | Substrate measuring device and a method of using the same | Chi-Hung Liao | 2021-08-17 |
| 11081383 | Substrate table with vacuum channels grid | Chi-Hung Liao | 2021-08-03 |
| 11016390 | Method for exposing wafer | Chi-Hung Liao | 2021-05-25 |
| 10971352 | Cleaning method and apparatus | Chi-Hung Liao | 2021-04-06 |
| 10867824 | Substrate detecting system in a substrate storage container | Chi-Hung Liao | 2020-12-15 |
| 10817015 | Display device and method for operating display device | Chiung Wen TSENG, Yi-Xuan HUANG | 2020-10-27 |
| 10811300 | Wafer table with dynamic support pins | Chi-Hung Liao | 2020-10-20 |
| 10775700 | Lithography system and method for exposing wafer | Chi-Hung Liao | 2020-09-15 |
| 10775706 | Lithography apparatus and method using the same | Chi-Hung Liao | 2020-09-15 |
| 10678146 | Particle removal from wafer table and photomask | Chi-Hung Liao | 2020-06-09 |
| 10651075 | Wafer table with dynamic support pins | Chi-Hung Liao | 2020-05-12 |