Issued Patents All Time
Showing 26–50 of 151 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10276372 | Method for integrated circuit patterning | Chih-Tsung Shih, Shinn-Sheng Yu, Jeng-Horng Chen | 2019-04-30 |
| 10274838 | System and method for performing lithography process in semiconductor device fabrication | Jui-Ching Wu, Jeng-Horng Chen, Chia-Chen Chen, Shu-Hao Chang, Shang-Chieh Chien +1 more | 2019-04-30 |
| 10274819 | EUV pellicle fabrication methods and structures thereof | Pei-Cheng Hsu, Chih-Tsung Shih, Jeng-Horng Chen, Chih-Cheng Lin, Hsin-Chang Lee +2 more | 2019-04-30 |
| 10168611 | Mask with multilayer structure and manufacturing method by using the same | Chih-Tsung Shih, Jeng-Horng Chen, Shinn-Sheng Yu | 2019-01-01 |
| 10162258 | Pellicle fabrication methods and structures thereof | Yun-Yue Lin, Hsuan-Chen Chen, Chih-Cheng Lin, Hsin-Chang Lee, Yao-Ching Ku +3 more | 2018-12-25 |
| 10162257 | Extreme ultraviolet lithography system, device, and method for printing low pattern density features | Yen-Cheng Lu, Shinn-Sheng Yu, Jeng-Horng Chen | 2018-12-25 |
| 10156790 | EUV lithography system and method with optimized throughput and stability | Yen-Cheng Lu, Jeng-Horng Chen, Shun-Der Wu | 2018-12-18 |
| 10036951 | Pellicle assembly and fabrication methods thereof | Pei-Cheng Hsu, Chih-Cheng Lin, Hsin-Chang Lee, Ta-Cheng Lien | 2018-07-31 |
| 10031411 | Pellicle for EUV mask and fabrication thereof | Chih-Tsung Shih, Shinn-Sheng Yu, Jeng-Horng Chen | 2018-07-24 |
| 10007174 | Extreme ultraviolet lithography process and mask | Chih-Tsung Shih, Shinn-Sheng Yu, Jeng-Horng Chen | 2018-06-26 |
| 10001701 | Pellicle structures and methods of fabricating thereof | Pei-Cheng Hsu, Hsin-Chang Lee, Yun-Yue Lin, Hsuan-Chen Chen, Hsuan-I WANG | 2018-06-19 |
| 9996013 | Extreme ultraviolet lithography process and mask | Yen-Cheng Lu, Jeng-Horng Chen, Shinn-Sheng Yu | 2018-06-12 |
| 9995999 | Lithography mask | Yun-Yue Lin, Hsin-Chang Lee, Chia-Jen Chen | 2018-06-12 |
| 9964850 | Method to mitigate defect printability for ID pattern | Yen-Cheng Lu, Chia-Hao Hsu, Shinn-Sheng Yu, Chia-Chen Chen, Jeng-Horng Chen | 2018-05-08 |
| 9897910 | Treating a capping layer of a mask | Pei-Cheng Hsu, Chih-Cheng Lin, Ta-Cheng Lien, Wei-Shiuan Chen, Hsin-Chang Lee | 2018-02-20 |
| 9886543 | Method providing for asymmetric pupil configuration for an extreme ultraviolet lithography process | Chia-Chun Chung, Norman Chen, Chih-Tsung Shih, Jeng-Horng Chen, Shinn-Sheng Yu | 2018-02-06 |
| 9869939 | Lithography process | Shinn-Sheng Yu | 2018-01-16 |
| 9870612 | Method for repairing a mask | Shinn-Sheng Yu, Wen-Chuan Wang, Sheng-Chi Chin | 2018-01-16 |
| 9869928 | Extreme ultraviolet light (EUV) photomasks, and fabrication methods thereof | Tao Huang, Chih-Tsung Shih, Chia-Jen Chen, Hsin-Chang Lee | 2018-01-16 |
| 9829785 | Extreme ultraviolet lithography process and mask | Yen-Cheng Lu, Shinn-Sheng Yu, Jeng-Horng Chen | 2017-11-28 |
| 9823585 | EUV focus monitoring systems and methods | Chih-Tsung Shih, Chieh-Jen Cheng, Jeng-Horng Chen, Chia-Chen Chen, Shinn-Sheng Yu +1 more | 2017-11-21 |
| 9766536 | Mask with multilayer structure and manufacturing method by using the same | Chih-Tsung Shih, Jeng-Horng Chen, Shinn-Sheng Yu | 2017-09-19 |
| 9760015 | Extreme ultraviolet lithography process | Shinn-Sheng Yu, Yen-Cheng Lu | 2017-09-12 |
| 9748133 | Via definition scheme | Yen-Cheng Lu, Chih-Tsung Shih, Shinn-Sheng Yu, Jeng-Horng Chen | 2017-08-29 |
| 9733562 | Extreme ultraviolet lithography process and mask | Yen-Cheng Lu, Jeng-Horng Chen, Shinn-Sheng Yu | 2017-08-15 |