Issued Patents All Time
Showing 26–45 of 45 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7902042 | Method of manufacturing SOI wafer and thus-manufactured SOI wafer | Norihiro Kobayashi, Masayuki Imai, Tatsuo Enomoto, Hiroshi Takeno | 2011-03-08 |
| 7560313 | SOI wafer and method for producing the same | Kiyoshi Mitani | 2009-07-14 |
| 7524744 | Method of producing SOI wafer and SOI wafer | Isao Yokokawa, Kiyotaka Takano, Kiyoshi Mitani | 2009-04-28 |
| 7521334 | Method for producing direct bonded wafer and direct bonded wafer | Norihiro Kobayashi, Toru Ishizuka, Tomohiko Ohta, Yasuo Nagaoka | 2009-04-21 |
| 7320929 | Method of fabricating SOI wafer | Kiyoshi Mitani | 2008-01-22 |
| 7288418 | Process for treating substrates for the microelectronics industry, and substrates obtained by this process | Thierry Barge, André Auberton-Herve, Naoto Tate | 2007-10-30 |
| 7176102 | Method for producing SOI wafer and SOI wafer | Naota Tate, Susumu Kuwabara, Kiyoshi Mitani | 2007-02-13 |
| 7029993 | Method for treating substrates for microelectronics and substrates obtained according to said method | Thierry Barge, André Auberton-Herve, Naoto Tate | 2006-04-18 |
| 6998329 | SOI wafer producing method, and wafer separating jig | Hiroyuki Takahashi, Kiyoshi Mitani | 2006-02-14 |
| 6897124 | Method of manufacturing a bonded wafers using a Bernoulli chuck | Naoto Tate | 2005-05-24 |
| 6884696 | Method for producing bonding wafer | Shinichi Tomizawa, Kiyoshi Mitani | 2005-04-26 |
| 6846718 | Method for producing SOI wafer and SOI wafer | Naoto Tate, Susumu Kuwabara, Kiyoshi Mitani | 2005-01-25 |
| 6380551 | Optical function device with photonic band gap and/or filtering characteristics | Takao Abe | 2002-04-30 |
| 6372609 | Method of Fabricating SOI wafer by hydrogen ION delamination method and SOI wafer fabricated by the method | Naoto Tate, Kiyoshi Mitani | 2002-04-16 |
| 6362076 | Method of fabricating an SOI wafer by hydrogen ion delamination without independent bonding heat treatment | Yukio Inazuki, Norihiro Kobayashi, Kiyoshi Mitani | 2002-03-26 |
| 6284628 | Method of recycling a delaminated wafer and a silicon wafer used for the recycling | Susumu Kuwahara, Kiyoshi Mitani, Masae Wada | 2001-09-04 |
| 6239004 | Method of forming oxide film on an SOI layer and method of fabricating a bonded wafer | Kiyoshi Mitani, Masatake Nakano | 2001-05-29 |
| 6238990 | Method for heat treatment of SOI wafer and SOI wafer heat-treated by the method | Norihiro Kobayashi, Kiyoshi Mitani | 2001-05-29 |
| 6140210 | Method of fabricating an SOI wafer and SOI wafer fabricated thereby | Kiyoshi Mitani, Yukio Inazuki | 2000-10-31 |
| 5998281 | SOI wafer and method for the preparation thereof | Kiyoshi Mitani, Masatake Katayama | 1999-12-07 |