Issued Patents All Time
Showing 26–39 of 39 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6699373 | Apparatus for processing the surface of a microelectronic workpiece | Daniel J. Woodruff, Kyle M. Hanson, Thomas H. Oberlitner, John M. Pedersen, Vladimir Zila | 2004-03-02 |
| 6645356 | Methods and apparatus for processing the surface of a microelectronic workpiece | Daniel J. Woodruff, Kyle M. Hanson, Thomas H. Oberlitner, John M. Pedersen, Vladimir Zila | 2003-11-11 |
| 6638410 | Apparatus and method for electrolytically depositing copper on a semiconductor workpiece | Thomas C. Taylor | 2003-10-28 |
| 6632345 | Apparatus and method for electrolytically depositing a metal on a workpiece | — | 2003-10-14 |
| 6565729 | Method for electrochemically depositing metal on a semiconductor workpiece | Gregory J. Wilson, Paul R. McHugh, Robert A. Weaver, Thomas Ritzdorf | 2003-05-20 |
| 6527925 | Contact assemblies, methods for making contact assemblies, and plating machines with contact assemblies for plating microelectronic workpieces | Robert W. Batz, Jr., John M. Pedersen, John L. Klocke | 2003-03-04 |
| 6508920 | Apparatus for low-temperature annealing of metallization microstructures in the production of a microelectronic device | Thomas Ritzdorf, E. Henry Stevens, Lyndon Graham, Curt Dundas | 2003-01-21 |
| 6309524 | Methods and apparatus for processing the surface of a microelectronic workpiece | Daniel J. Woodruff, Kyle M. Hanson, Thomas H. Oberlitner, John M. Pedersen, Vladimir Zila | 2001-10-30 |
| 6309520 | Methods and apparatus for processing the surface of a microelectronic workpiece | Daniel J. Woodruff, Kyle M. Hanson, Thomas H. Oberlitner, John M. Pedersen, Vladimir Zila | 2001-10-30 |
| 6306276 | Aqueous electrodeposition of rare earth and transition metals | Ken Nobe, Morton I. Schwartz, No Sang Myung | 2001-10-23 |
| 6303010 | Methods and apparatus for processing the surface of a microelectronic workpiece | Daniel J. Woodruff, Kyle M. Hanson, Thomas H. Oberlitner, John M. Pedersen, Vladimir Zila | 2001-10-16 |
| 6290833 | Method for electrolytically depositing copper on a semiconductor workpiece | — | 2001-09-18 |
| 6277263 | Apparatus and method for electrolytically depositing copper on a semiconductor workpiece | — | 2001-08-21 |
| 6197181 | Apparatus and method for electrolytically depositing a metal on a microelectronic workpiece | — | 2001-03-06 |