Issued Patents All Time
Showing 51–65 of 65 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8357434 | Apparatus for the deposition of a conformal film on a substrate and methods therefor | Dae-Han Choi, Jisoo Kim, Eric A. Hudson, Conan Chiang, S. M. Reza Sadjadi | 2013-01-22 |
| 8268118 | Critical dimension reduction and roughness control | Dae-Han Choi, Jisoo Kim, Peter Cirigliano, Zhisong Huang, Robert Charatan +1 more | 2012-09-18 |
| 7910489 | Infinitely selective photoresist mask etch | Ji Soo Kim, Peter Cirigliano, Dongho Heo, Daehan Choi, S. M. Reza Sadjadi | 2011-03-22 |
| 7902073 | Glue layer for hydrofluorocarbon etch | Ji Soo Kim, Deepak Gupta, S. M. Reza Sadjadi | 2011-03-08 |
| 7695632 | Critical dimension reduction and roughness control | Dae-Han Choi, Jisoo Kim, Peter Cirigliano, Zhisong Huang, Robert Charatan +1 more | 2010-04-13 |
| 7560388 | Self-aligned pitch reduction | Jisoo Kim, Daehan Choi, S. M. Reza Sadjadi | 2009-07-14 |
| 7541291 | Reduction of feature critical dimensions | Sean S. Kang, Wan-Lin Chen, Eric A. Hudson, S. M. Reza Sadjadi, Gan Ming Zhao | 2009-06-02 |
| 7442649 | Etch with photoresist mask | Jisoo Kim, Binet Worsham, Robert Charatan, S.M. Reza Sadjadi | 2008-10-28 |
| 7390749 | Self-aligned pitch reduction | Ji Soo Kim, Daehan Choi, S. M. Reza Sadjadi | 2008-06-24 |
| 7294580 | Method for plasma stripping using periodic modulation of gas chemistry and hydrocarbon addition | Seokmin Yun, Ji Zhu, Peter Cirigliano, Thomas S. Choi, Peter Loewenhardt +4 more | 2007-11-13 |
| 7250371 | Reduction of feature critical dimensions | Sean S. Kang, Wan-Lin Chen, Eric A. Hudson, S. M. Reza Sadjadi, Gan Ming Zhao | 2007-07-31 |
| 7192531 | In-situ plug fill | Sean S. Kang, Wan-Lin Chen, Eric A. Hudson, Reza Sadjadi | 2007-03-20 |
| 7098130 | Method of forming dual damascene structure | Ji Soo Kim, S. M. Reza Sadjadi | 2006-08-29 |
| 7084070 | Treatment for corrosion in substrate processing | Sean S. Kang, S M Reza Sadjadi, Subhash Deshmukh, Ji Soo Kim | 2006-08-01 |
| 6979579 | Methods and apparatus for inspecting contact openings in a plasma processing system | Jisoo Kim, Sean S. Kang, Binet Worsham, Bi-Ming Yen, Reza Sadjadi +1 more | 2005-12-27 |