Issued Patents All Time
Showing 26–49 of 49 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7243551 | Micromechanical component having a sealed cavity and at least two dielectric layers and corresponding method for its manufacture | Arnim Hoechst | 2007-07-17 |
| 7202544 | Giant magnetoresistance structure | Detlef Gruen, Henrik Siegle, Peter Hein | 2007-04-10 |
| 7153718 | Micromechanical component as well as a method for producing a micromechanical component | Peter Hein, Eckhard Graf | 2006-12-26 |
| 7148077 | Micromechanical structural element having a diaphragm and method for producing such a structural element | Matthias Fuertsch, Stefan Pinter, Heribert Weber, Lars Metzger, Christoph Schelling +1 more | 2006-12-12 |
| 7060197 | Micromechanical mass flow sensor and method for the production thereof | Matthias Fuertsch, Lars Metzger, Frieder Sundermeier | 2006-06-13 |
| 6955975 | Method for joining a silicon plate to a second plate | Frank Reichenbach, Ralf Hausner, Frieder Haag, Eckhard Graf, Markus Lutz | 2005-10-18 |
| 6951824 | Method for manufacturing a micromechanical component and a component that is manufactured in accordance with the method | Peter Hein, Eckhard Graf | 2005-10-04 |
| 6905615 | Method of manufacturing a micromechanical component | Wilhelm Frey, Udo Bischof, Lars Metzger | 2005-06-14 |
| 6876048 | Micromechanical component as well as a method for producing a micromechanical component | Peter Hein, Eckhard Graf | 2005-04-05 |
| 6867061 | Method for producing surface micromechanical structures, and sensor | Wilhelm Frey, Lars Metzger | 2005-03-15 |
| 6808640 | Micromechanical part and method for its manufacture | Wilhelm Frey | 2004-10-26 |
| 6739193 | Micromechanical structure, in particular for an acceleration sensor or yaw rate sensor and a corresponding method for producing the same | Jochen Franz, Matthias Illing, Frank Henning, Peter Hein | 2004-05-25 |
| 6686638 | Micromechanical component including function components suspended movably above a substrate | Lars Metzger | 2004-02-03 |
| 6679995 | Method of micromechanical manufacturing of a semiconductor element, in particular an acceleration sensor | Branko Banjac, Doris Schielein, Dirk Bueche | 2004-01-20 |
| 6664200 | Method of manufacturing a semiconductor component and polyimide etchant therefor | Edward R. Prack, Treliant Fang | 2003-12-16 |
| 6634232 | Acceleration sensor with limited movability in the vertical direction | Rasmus Rettig, Oliver Kohn, Dietrich Schubert | 2003-10-21 |
| 6618410 | Optoelectronic semiconductor component | Günter Reuscher, Thomas Litz, Gottfried Landwehr | 2003-09-09 |
| 6483392 | Polarizer and method for manufacturing the same | Martin Hennemann | 2002-11-19 |
| 6406979 | Method for sectioning a substrate wafer into a plurality of substrate chips | Eckhard Graf | 2002-06-18 |
| 6399473 | Method of producing a II-VI semiconductor component containing selenium and/or sulrfur | Matthias Keller, Thomas Litz, Gottfried Landwehr, Hans-Jürgen Lugauer, Andreas Waag +1 more | 2002-06-04 |
| 6372536 | II-VI semiconductor component having at least one junction between a layer containing Se and a layer containing BeTe, and process for producing the junction | Andreas Waag, Thierry Baron, Gottfried Landwehr, Thomas Litz, Günter Reuscher +5 more | 2002-04-16 |
| 6285697 | Semiconductor laser component | Gottfried Landwehr, Markus Keim, Günter Reuscher, Thomas Litz, Thierry Baron +1 more | 2001-09-04 |
| 6147365 | Optoelectronic semiconductor component | Thomas Litz, Hans-Jürgen Lugauer, Markus Keim, Thierry Baron, Günter Reuscher +1 more | 2000-11-14 |
| 5773083 | Method for coating a substrate with a coating solution | Thomas W. Peterson | 1998-06-30 |