Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6679995 | Method of micromechanical manufacturing of a semiconductor element, in particular an acceleration sensor | Frank Fischer, Doris Schielein, Dirk Bueche | 2004-01-20 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6679995 | Method of micromechanical manufacturing of a semiconductor element, in particular an acceleration sensor | Frank Fischer, Doris Schielein, Dirk Bueche | 2004-01-20 |