Issued Patents All Time
Showing 51–75 of 82 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9166066 | Micromechanical sensor apparatus having a movable gate and corresponding production method | — | 2015-10-20 |
| 9159637 | Electronic device with an interlocking mold package | Gary O'Brien, Andrew Graham | 2015-10-13 |
| 9130081 | Bolometer having absorber with pillar structure for thermal shorting | Gary Yama, Fabian Purkl | 2015-09-08 |
| 9110090 | Piezoresistive micromechanical sensor component and corresponding measuring method | Reinhard Neul, Christian Rettig, Achim Trautmann, Daniel Christoph Meisel, Alexander Buhmann +1 more | 2015-08-18 |
| 9111787 | Arrangement of two substrates having an SLID bond and method for producing such an arrangement | Achim Trautmann | 2015-08-18 |
| 9093594 | Multi-stack film bolometer | Po-Jui Chen, Fabian Purkl, Gary Yama, Gary O'Brien | 2015-07-28 |
| 9082882 | Microelectronic component and corresponding production process | Christoph Schelling | 2015-07-14 |
| 9064982 | Thin-film encapsulated infrared sensor | Fabian Purkl, Gary Yama, Andrew Graham, Ashwin Samarao, Gary O'Brien | 2015-06-23 |
| 9064800 | Method of manufacturing a sensor device having a porous thin-film metal electrode | Gary O'Brien, Fabian Purkl, Gary Yama, Ashwin Samarao | 2015-06-23 |
| 9030198 | Magnetic field sensor and method for producing a magnetic field sensor | Frank Schatz, Tino Fuchs | 2015-05-12 |
| 8986256 | Manufacturing method for a porous microneedle array and corresponding porous microneedle array and corresponding substrate composite | Dick Scholten, Michael Stumber, Franz Laermer | 2015-03-24 |
| 8981499 | MEMS chip package and method for manufacturing an MEMS chip package | Ricardo Ehrenpfordt, Mathias Bruendel, Andre Gerlach, Christina Leinenbach, Sonja Knies +1 more | 2015-03-17 |
| 8975669 | Micromechanical sensor apparatus with a movable gate, and corresponding production process | Oleg Jakovlev, Alexander Buhmann | 2015-03-10 |
| 8779533 | MEMS with single use valve and method of operation | Po-Jui Chen | 2014-07-15 |
| 8761418 | Microelectromechanical loudspeaker array with predetermined period of time of diaphragm relaxation | Stefan Zimmermann | 2014-06-24 |
| 8749013 | Sensor and method for its production | Hubert Benzel, Simon Armbruster, Arnim Hoechst, Christoph Schelling | 2014-06-10 |
| 8556504 | Thermally decoupled micro-structured reference element for sensors | Ingo Herrmann, Daniel Herrmann, Frank Freund, Martin Eckardt | 2013-10-15 |
| 8492188 | Method for producing a micromechanical component | Heiko Stahl, Christina Leinenbach, Axel Franke, Jochen Reinmuth, Christian Rettig | 2013-07-23 |
| 8492850 | Method for producing a silicon substrate having modified surface properties and a silicon substrate of said type | Gerhard Lammel, Hubert Benzel, Matthias Illing, Franz Laermer, Silvia Kronmueller +4 more | 2013-07-23 |
| 8415760 | Sensor for detecting thermal radiation | Thorsten Mueller | 2013-04-09 |
| 8377315 | Method for manufacturing porous microstructures, porous microstructures manufactured according to this method, and the use thereof | Dick Scholten, Tjalf Pirk, Michael Stumber, Franz Laermer, Ralf Reichenbach | 2013-02-19 |
| 8354033 | Method for producing porous microneedles and their use | Dick Scholten, Julia Cassemeyer, Michael Stumber, Franz Laermer, Christian Maeurer | 2013-01-15 |
| 8334534 | Sensor and method for the manufacture thereof | Jochen Reinmuth, Neil Davies, Simon Armbruster | 2012-12-18 |
| 8286854 | Microsystem | Christian Rettig, Axel Franke | 2012-10-16 |
| 8212326 | Manufacturing method for a micromechanical component having a thin-layer capping | — | 2012-07-03 |