Issued Patents All Time
Showing 76–82 of 82 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8163585 | Method for manufacturing a sensor element, and sensor element | — | 2012-04-24 |
| 8165324 | Micromechanical component and method for its production | Marco Lammer | 2012-04-24 |
| 8148234 | Method for manufacturing a semiconductor structure, and a corresponding Semiconductor Structure | Gerhard Lammel, Hubert Benzel, Matthias Illing, Franz Laermer, Silvia Kronmueller +4 more | 2012-04-03 |
| 8007169 | Sensor | Bernhard Opitz, Daniel Herrmann, Oliver Wolst | 2011-08-30 |
| 7923794 | Micromechanical component having thin-layer encapsulation and production method | — | 2011-04-12 |
| 7868298 | Radiation sensor element, method for producing a radiation sensor element and sensor field | — | 2011-01-11 |
| 7851248 | Method for producing a micromechanical component having a thin-layer capping | Silvia Kronmueller, Tino Fuchs, Christina Leinenbach, Marco Lammer | 2010-12-14 |