Issued Patents All Time
Showing 26–35 of 35 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6359264 | Thermal cycling module | Charles D. Schaper, Hooman Bolandi | 2002-03-19 |
| 6352623 | Vertically configured chamber used for multiple processes | Konstantin Volodarsky, Boguslaw Nagorski, Rimma Volodarsky, Cyprian Emeka Uzoh, Homayoun Talieh | 2002-03-05 |
| 6313441 | Control system and method for providing variable ramp rate operation of a thermal cycling system | Charles D. Schaper, Hooman Bolandi | 2001-11-06 |
| 6278089 | Heater for use in substrate processing | Hooman Bolandi, Charles D. Schaper | 2001-08-21 |
| 6076668 | Golf head cover organizer | Vincent J. Keane | 2000-06-20 |
| 5916012 | Control of chemical-mechanical polishing rate across a substrate surface for a linear polisher | Anil K. Pant, Joseph R. Breivogel, Robert M. Rivera | 1999-06-29 |
| 5871390 | Method and apparatus for aligning and tensioning a pad/belt used in linear planarization for chemical mechanical polishing | Anil K. Pant, Joseph R. Breivogel, Konstantin Volodarski, Leon Volfovski | 1999-02-16 |
| 5800248 | Control of chemical-mechanical polishing rate across a substrate surface | Anil K. Pant, Anthony Meyer, Konstantin Volodarsky, David E. Weldon | 1998-09-01 |
| 5762536 | Sensors for a linear polisher | Anil K. Pant, Joseph R. Breivogel, Rahul Jairath, Erik H. Engdahl | 1998-06-09 |
| 5722877 | Technique for improving within-wafer non-uniformity of material removal for performing CMP | Anthony Meyer, Thomas G. Mallon, Bradley Scott Withers | 1998-03-03 |