Issued Patents All Time
Showing 1–17 of 17 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11923208 | Methods and apparatuses for chemical delivery for brush conditioning | Corey Alan Hughes, Erik Scott Nelson, Steven Kenneth Christie, Brent Allan Best | 2024-03-05 |
| 11694910 | Brush with non-constant nodule density | Erik Scott Nelson, Corey Alan Hughes, Brent Allan Best | 2023-07-04 |
| 11684144 | Hybrid material post-CMP brushes and methods for forming the same | Yuyan Luo, Erik Scott Nelson, Brent Allan Best | 2023-06-27 |
| 11205582 | Methods and apparatuses for effluent monitoring for brush conditioning | Corey Alan Hughes, Erik Scott Nelson, Steven Kenneth Christie, Brent Allan Best | 2021-12-21 |
| 10410936 | Methods and apparatuses for effluent monitoring for brush conditioning | Corey Alan Hughes, Erik Scott Nelson, Steven Kenneth Christie, Brent Allan Best | 2019-09-10 |
| 10405166 | Methods and apparatuses for wireless communication with a brush | Corey Alan Hughes, Erik Scott Nelson, Steven Kenneth Christie, Brent Allan Best | 2019-09-03 |
| 10271636 | Archimedes brush for semiconductor cleaning | Erik Scott Nelson, Robert Willis | 2019-04-30 |
| 10149135 | Methods and apparatuses for wireless communication with a brush | Corey Alan Hughes, Erik Scott Nelson, Steven Kenneth Christie, Brent Allan Best | 2018-12-04 |
| 9455163 | Brush mandrel for PVA sponge brush | Robert Willis | 2016-09-27 |
| 9237797 | Conical sponge brush for cleaning semiconductor wafers | Jeffrey J. Tyrrell | 2016-01-19 |
| 9202723 | Brush with cantilevered nodules | Michael G. Croker, Robert Willis | 2015-12-01 |
| D727579 | Brush core for a sponge brush | Robert Willis | 2015-04-21 |
| 8898845 | Brush mandrel for PVA sponge brush | Robert Willis | 2014-12-02 |
| 8778087 | Conical sponge brush for cleaning semiconductor wafers | Jeffrey J. Tyrrell | 2014-07-15 |
| 7795150 | Metal capping of damascene structures to improve reliability using hyper selective chemical-mechanical deposition | Elvis M. Chan | 2010-09-14 |
| 7344989 | CMP wafer contamination reduced by insitu clean | Elvis M. Chan | 2008-03-18 |
| 5722877 | Technique for improving within-wafer non-uniformity of material removal for performing CMP | Anthony Meyer, Thomas G. Mallon, Douglas W. Young | 1998-03-03 |