Issued Patents All Time
Showing 26–50 of 68 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8233133 | Exposure method, exposure apparatus, and method for producing device | — | 2012-07-31 |
| 8208119 | Exposure apparatus, exposure method, and method for producing device | Naoyuki Kobayashi, Soichi Owa, Yasuhiro Omura | 2012-06-26 |
| 8208117 | Exposure method, substrate stage, exposure apparatus, and device manufacturing method | Soichi Owa, Nobutaka Magome, Yoshihiko Kudo, Jiro Inoue, Hirotaka Kohno +6 more | 2012-06-26 |
| 8054447 | Exposure apparatus, exposure method, method for producing device, and optical part | Hiroyuki Nagasaka, Hiroaki Takaiwa, Ryuichi Hoshika, Hitoshi Ishizawa | 2011-11-08 |
| 8040491 | Exposure method, substrate stage, exposure apparatus, and device manufacturing method | Soichi Owa, Nobutaka Magome, Yoshihiko Kudo | 2011-10-18 |
| 8004650 | Exposure apparatus and device manufacturing method | — | 2011-08-23 |
| 7911582 | Exposure apparatus and device manufacturing method | Nobutaka Magome, Issey Tanaka | 2011-03-22 |
| 7817244 | Exposure apparatus and method for producing device | Masahiro Nei, Naoyuki Kobayashi, Hiroshi Chiba | 2010-10-19 |
| 7713889 | Substrate processing method, photomask manufacturing method, photomask, and device manufacturing method | — | 2010-05-11 |
| 7639343 | Exposure apparatus and device manufacturing method | — | 2009-12-29 |
| 7589821 | Exposure apparatus and device manufacturing method | — | 2009-09-15 |
| 7505111 | Exposure apparatus and device manufacturing method | Issey Tanaka | 2009-03-17 |
| 7483117 | Exposure method, exposure apparatus, and method for producing device | — | 2009-01-27 |
| 7483119 | Exposure method, substrate stage, exposure apparatus, and device manufacturing method | Soichi Owa, Nobutaka Magome, Yoshihiko Kudo, Jiro Inoue, Hiroyuki Nagasaka | 2009-01-27 |
| 7446851 | Exposure apparatus and device manufacturing method | — | 2008-11-04 |
| 7446858 | Exposure method and apparatus, and method for fabricating device | Takehito Kudo | 2008-11-04 |
| 7436486 | Exposure apparatus and device manufacturing method | — | 2008-10-14 |
| 7405803 | Image forming state adjusting system, exposure method and exposure apparatus, and program and information storage medium | Yasuo Shimizu, Kousuke Suzuki, Tomoyuki Matsuyama | 2008-07-29 |
| 7391497 | Image forming state adjusting system, exposure method and exposure apparatus, and program and information storage medium | Yasuo Shimizu, Kousuke Suzuki, Tomoyuki Matsuyama | 2008-06-24 |
| 7242455 | Exposure apparatus and method for producing device | Masahiro Nei, Naoyuki Kobayashi, Hiroshi Chiba | 2007-07-10 |
| 7230682 | Image forming state adjusting system, exposure method and exposure apparatus, and program and information storage medium | Yasuo Shimizu, Kousuke Suzuki, Tomoyuki Matsuyama | 2007-06-12 |
| 7102731 | Projection optical system adjustment method, prediction method, evaluation method, adjustment method, exposure method and exposure apparatus, program, and device manufacturing method | Toshiharu Nakashima, Kenji Higashi | 2006-09-05 |
| 7088426 | Projection optical system adjustment method, prediction method, evaluation method, adjustment method, exposure method and exposure apparatus, program, and device manufacturing method | Toshiharu Nakashima, Kenji Higashi | 2006-08-08 |
| 6661498 | Projection exposure apparatus and method employing rectilinear aperture stops for use with periodic mask patterns | — | 2003-12-09 |
| 6284416 | Photo mask and exposure method using same | Naomasa Shiraishi, Nobutaka Magome | 2001-09-04 |