Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9885959 | Illumination optical apparatus having deflecting member, lens, polarization member to set polarization in circumference direction, and optical integrator | Shigeru Hirukawa | 2018-02-06 |
| 9678437 | Illumination optical apparatus having distribution changing member to change light amount and polarization member to set polarization in circumference direction | Shigeru Hirukawa | 2017-06-13 |
| 9164393 | Exposure method and apparatus, and method for fabricating device with light amount distribution having light larger in four areas | Shigeru Hirukawa | 2015-10-20 |
| 9146474 | Exposure method and apparatus, and method for fabricating device with light amount distribution having light larger and different linear polarization states in an on-axis area and a plurality of off-axis areas | Shigeru Hirukawa | 2015-09-29 |
| 8675177 | Exposure method and apparatus, and method for fabricating device with light amount distribution having light larger in first and second pairs of areas | Shigeru Hirukawa | 2014-03-18 |
| 7515247 | Illumination optical system, exposure apparatus, and exposure method with polarized state fluctuation correcting device | Osamu Tanitsu, Hirohisa Tanaka, Kenichi Muramatsu, Norio Komine, Hisashi Nishinaga +1 more | 2009-04-07 |
| 7515248 | Illumination optical system, exposure apparatus, and exposure method with polarized state detection result and adjustment | Osamu Tanitsu, Hirohisa Tanaka, Kenichi Muramatsu, Norio Komine, Hisashi Nishinaga +1 more | 2009-04-07 |
| 7446858 | Exposure method and apparatus, and method for fabricating device | Shigeru Hirukawa | 2008-11-04 |
| 7423731 | Illumination optical system, exposure apparatus, and exposure method with polarized switching device | Osamu Tanitsu, Hirohisa Tanaka, Kenichi Muramatsu, Norio Komine, Hisashi Nishinaga +1 more | 2008-09-09 |