Issued Patents All Time
Showing 26–42 of 42 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7244932 | Electron beam apparatus and device fabrication method using the electron beam apparatus | Mamoru Nakasuji, Tohru Satake, Nobuharu Noji, Hirosi Sobukawa, Tsutomu Karimata +6 more | 2007-07-17 |
| 7205559 | Electron beam apparatus and device manufacturing method using same | Takao Kato, Mamoru Nakasuji, Nobuharu Noji, Tohru Satake | 2007-04-17 |
| 7135676 | Inspection system by charged particle beam and method of manufacturing devices using the system | Mamoru Nakasuji, Nobuharu Noji, Tohru Satake, Toshifumi Kimba, Hirosi Sobukawa +5 more | 2006-11-14 |
| 7129485 | Electron beam apparatus and method of manufacturing semiconductor device using the apparatus | Mamoru Nakasuji, Nobuharu Noji, Tohru Satake, Masahiro Hatakeyama, Kenji Watanabe +7 more | 2006-10-31 |
| 7109483 | Method for inspecting substrate, substrate inspecting system and electron beam apparatus | Mamoru Nakasuji, Nobuharu Noji, Tohru Satake, Toshifumi Kimba, Masahiro Hatakeyama +6 more | 2006-09-19 |
| 7095022 | Electron beam apparatus and method of manufacturing semiconductor device using the apparatus | Mamoru Nakasuji, Nobuharu Noji, Tohru Satake, Masahiro Hatakeyama, Kenji Watanabe +7 more | 2006-08-22 |
| 6953944 | Scanning device and method including electric charge movement | Yoshiaki Kohama, Akihiro Goto, Yukiharu Okubo | 2005-10-11 |
| 6670602 | Scanning device and scanning method | Yoshiaki Kohama, Akihiro Goto, Yukiharu Okubo | 2003-12-30 |
| 6593152 | Electron beam apparatus and method of manufacturing semiconductor device using the apparatus | Mamoru Nakasuji, Tohru Satake, Kenji Watanabe, Takeshi Murakami, Nobuharu Noji +9 more | 2003-07-15 |
| 6479819 | Object observation apparatus and object observation | Yoichi Watanabe, Yoshiaki Kohama | 2002-11-12 |
| 6365897 | Electron beam type inspection device and method of making same | Akihiro Goto, Hiroshi Nishimura | 2002-04-02 |
| 6184526 | Apparatus and method for inspecting predetermined region on surface of specimen using electron beam | Yoshiaki Kohama, Shigeru Takemoto | 2001-02-06 |
| 6011262 | Object observing apparatus and method for adjusting the same | Hidekazu Takekoshi | 2000-01-04 |
| 5479537 | Image processing method and apparatus | Shinichi Okita | 1995-12-26 |
| 5373567 | Method and apparatus for pattern matching | Kozo Takahashi, Toshiaki Kitamura | 1994-12-13 |
| 4769551 | Pattern detecting apparatus utilizing energy beam | Kinya Kato, Tatsumi Ishizeki, Kou Sekiba, Hiroaki Iseya | 1988-09-06 |
| 4744663 | Pattern position detection apparatus using laser beam | Kinya Kato | 1988-05-17 |