Issued Patents All Time
Showing 101–125 of 147 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5854671 | Scanning exposure method and apparatus therefor and a projection exposure apparatus and method which selectively chooses between static exposure and scanning exposure | — | 1998-12-29 |
| 5844247 | Exposure apparatus and method which synchronously moves the mask and the substrate to measure displacement | — | 1998-12-01 |
| 5842824 | Substrate transport apparatus | — | 1998-12-01 |
| 5815249 | Illumination optical apparatus and method having a wavefront splitter and an optical integrator | Naomasa Shiraishi | 1998-09-29 |
| 5815248 | Illumination optical apparatus and method having a wavefront splitter and an optical integrator | Naomasa Shiraishi | 1998-09-29 |
| 5798195 | Stepping accuracy measuring method | — | 1998-08-25 |
| 5793474 | Exposure apparatus wherein a wafer contact portion of a movable stage includes linear ridges | — | 1998-08-11 |
| 5760454 | Pattern form of an active region of a MOS type semiconductor device | — | 1998-06-02 |
| 5739899 | Projection exposure apparatus correcting tilt of telecentricity | Seiro Murakami, Hiroshi Chiba | 1998-04-14 |
| 5737441 | Aligning method and apparatus | — | 1998-04-07 |
| 5734478 | Projection exposure apparatus | Nobutaka Magome, Hideo Mizutani | 1998-03-31 |
| 5693439 | Exposure method and apparatus | Yasuaki Tanaka, Seiro Murakami | 1997-12-02 |
| 5682243 | Method of aligning a substrate | — | 1997-10-28 |
| 5674651 | Alignment method for use in an exposure system | — | 1997-10-07 |
| 5657129 | Method and apparatus for the alignment of a substrate | — | 1997-08-12 |
| 5646413 | Exposure apparatus and method which synchronously moves the mask and the substrate to measure displacement | — | 1997-07-08 |
| 5634231 | Semiconductor manufacturing apparatus | — | 1997-06-03 |
| 5591958 | Scanning exposure method and apparatus | Shinji Wakamoto | 1997-01-07 |
| 5561606 | Method for aligning shot areas on a substrate | Kazuya Ota, Masaharu Kawakubo | 1996-10-01 |
| 5559582 | Exposure apparatus | Masaaki Aoyama | 1996-09-24 |
| 5539497 | Projection exposure apparatus and exposure method | — | 1996-07-23 |
| 5493403 | Method and apparatus for the alignment of a substrate | — | 1996-02-20 |
| 5477304 | Projection exposure apparatus | — | 1995-12-19 |
| 5473410 | Projection exposure apparatus | — | 1995-12-05 |
| 5473435 | Method of measuring the bent shape of a movable mirror of an exposure apparatus | Takashi Masuyuki, Shinichi Takagi | 1995-12-05 |