Issued Patents All Time
Showing 51–75 of 147 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6577382 | Substrate transport apparatus and method | Yoshiki Kida | 2003-06-10 |
| 6563565 | Apparatus and method for projection exposure | — | 2003-05-13 |
| RE38113 | Method of driving mask stage and method of mask alignment | Seiro Murakami | 2003-05-06 |
| RE38085 | Exposure method and projection exposure apparatus | — | 2003-04-22 |
| 6549268 | Exposure method and apparatus | — | 2003-04-15 |
| 6549269 | Exposure apparatus and an exposure method | Kazuya Ota | 2003-04-15 |
| 6545746 | Projection exposure apparatus | — | 2003-04-08 |
| RE38038 | Exposure method and projection exposure apparatus | — | 2003-03-18 |
| 6522386 | Exposure apparatus having projection optical system with aberration correction element | — | 2003-02-18 |
| RE37946 | Exposure method and projection exposure apparatus | — | 2002-12-31 |
| 6498352 | Method of exposing and apparatus therefor | — | 2002-12-24 |
| RE37913 | Exposure method and projection exposure apparatus | — | 2002-11-26 |
| 6486955 | Shape measuring method and shape measuring device, position control method, stage device, exposure apparatus and method for producing exposure apparatus, and device and method for manufacturing device | — | 2002-11-26 |
| 6462807 | Projection exposure apparatus and method | — | 2002-10-08 |
| 6433872 | Exposure method and apparatus | Yasuaki Tanaka, Seiro Murakami | 2002-08-13 |
| 6414743 | Exposure apparatus, exposure method using the same and method of manufacture of circuit device | Toru Kiuchi | 2002-07-02 |
| 6411386 | Aligning apparatus and method for aligning mask patterns with regions on a substrate | — | 2002-06-25 |
| 6400445 | Method and apparatus for positioning substrate | Yoshiki Kida, Masahiko Okumura | 2002-06-04 |
| 6400441 | Projection exposure apparatus and method | Kazuya Ota | 2002-06-04 |
| 6396568 | Exposure apparatus and method | — | 2002-05-28 |
| 6396071 | Scanning exposure method and apparatus | Shinji Wakamoto | 2002-05-28 |
| 6388734 | Projection exposure apparatus | Noriaki Tokuda | 2002-05-14 |
| 6341007 | Exposure apparatus and method | Kazuya Ota | 2002-01-22 |
| 6335787 | Projection exposure apparatus | — | 2002-01-01 |
| 6331885 | Stage apparatus, scanning type exposure apparatus, and device produced with the same | — | 2001-12-18 |