Issued Patents All Time
Showing 26–50 of 147 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6836093 | Exposure method and apparatus | — | 2004-12-28 |
| 6813000 | Exposure method and apparatus | — | 2004-11-02 |
| 6803992 | Projection exposure apparatus | Noriaki Tokuda | 2004-10-12 |
| 6798491 | Exposure apparatus and an exposure method | Kazuya Ota | 2004-09-28 |
| 6765647 | Exposure method and device | — | 2004-07-20 |
| 6741332 | Stage system, exposure apparatus, and device manufacturing method | — | 2004-05-25 |
| 6727978 | Projection exposure apparatus and projection exposure method | — | 2004-04-27 |
| 6707536 | Projection exposure apparatus | — | 2004-03-16 |
| 6704090 | Exposure method and exposure apparatus | — | 2004-03-09 |
| 6700667 | Exposure apparatus and method | — | 2004-03-02 |
| 6690450 | Exposure method, exposure apparatus, method for producing exposure apparatus, and method for producing device | — | 2004-02-10 |
| 6667796 | Exposure method and apparatus | — | 2003-12-23 |
| 6653025 | Mask producing method | — | 2003-11-25 |
| 6654095 | Exposure apparatus, exposure method, and device manufacturing method | — | 2003-11-25 |
| 6654097 | Projection exposure apparatus | — | 2003-11-25 |
| RE38320 | Projection exposure apparatus wherein focusing of the apparatus is changed by controlling the temperature of a lens element of the projection optical system | Kazuo Ushida, Seiro Murakami, Tohru Kiuchi, Yasuaki Tanaka | 2003-11-18 |
| 6624433 | Method and apparatus for positioning substrate and the like | Masahiko Okumura | 2003-09-23 |
| 6608665 | Scanning exposure apparatus having adjustable illumination area and methods related thereto | Kazuaki Suzuki | 2003-08-19 |
| 6608681 | Exposure method and apparatus | Yasuaki Tanaka, Seiro Murakami | 2003-08-19 |
| 6597430 | Exposure method, illuminating device, and exposure system | Osamu Tanitsu, Kyoji Nakamura | 2003-07-22 |
| 6590637 | Exposure apparatus and method | — | 2003-07-08 |
| 6590636 | Projection exposure method and apparatus | — | 2003-07-08 |
| 6590634 | Exposure apparatus and method | Kazuya Ota | 2003-07-08 |
| 6590633 | Stage apparatus and method for producing circuit device utilizing the same | Toru Kiuchi | 2003-07-08 |
| 6587201 | Aligning apparatus and method for aligning mask patterns with regions on a substrate | — | 2003-07-01 |