Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6545284 | Face position detection method and apparatus, and exposure method and exposure apparatus, a production method for an exposure apparatus and a production method for a semiconductor device | — | 2003-04-08 |
| 6137562 | Substrate adjuster, substrate holder and substrate holding method | Katsuaki Ishimaru | 2000-10-24 |
| 5638179 | Method for measuring amount of bend of moving mirror | — | 1997-06-10 |
| 5473435 | Method of measuring the bent shape of a movable mirror of an exposure apparatus | Kenji Nishi, Shinichi Takagi | 1995-12-05 |