Issued Patents All Time
Showing 126–147 of 147 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5469260 | Stage-position measuring apparatus | Shinichi Takagi | 1995-11-21 |
| 5464715 | Method of driving mask stage and method of mask alignment | Seiro Murakami | 1995-11-07 |
| 5448332 | Exposure method and apparatus | Yasuyuki Sakakibara, Yasuaki Tanaka, Seiro Murakami | 1995-09-05 |
| 5440138 | Exposure method | — | 1995-08-08 |
| 5272501 | Projection exposure apparatus | Saburo Kamiya, Naomasa Shiraishi | 1993-12-21 |
| 5243195 | Projection exposure apparatus having an off-axis alignment system and method of alignment therefor | — | 1993-09-07 |
| 5214489 | Aligning device for exposure apparatus | Hideo Mizutani | 1993-05-25 |
| 5194893 | Exposure method and projection exposure apparatus | — | 1993-03-16 |
| 5138176 | Projection optical apparatus using plural wavelengths of light | — | 1992-08-11 |
| 5114224 | Automatic follow-up projecting system | Takashi Miyamoto, Kazuya Miyagawa, Yukihito Tomimatsu, Tsutomu Sugiura, Taku Ichihara | 1992-05-19 |
| 5001870 | Method of cutting and disassembling cylindrical structure | Isaya Yokota, Kenjiro Nakamura | 1991-03-26 |
| 5003342 | Exposure apparatus | — | 1991-03-26 |
| 4962318 | Alignment system for exposure apparatus | — | 1990-10-09 |
| 4952815 | Focusing device for projection exposure apparatus | — | 1990-08-28 |
| 4897553 | Projection exposure apparatus | — | 1990-01-30 |
| 4880310 | Optical device for alignment in a projection exposure apparatus | — | 1989-11-14 |
| 4856905 | Projection exposure apparatus | — | 1989-08-15 |
| 4829193 | Projection optical apparatus with focusing and alignment of reticle and wafer marks | — | 1989-05-09 |
| 4794426 | Alignment apparatus | — | 1988-12-27 |
| 4780616 | Projection optical apparatus for mask to substrate alignment | Hidemi Kawai, Kazuaki Suzuki, Makoto Uehara | 1988-10-25 |
| 4739373 | Projection exposure apparatus | Nobutaka Magome | 1988-04-19 |
| 4688648 | Method of and apparatus for crushing earth under the ground | Taro Ikeda, Teruo Yahiro, Hiroshi Yoshida, Takahisa Isobe, Yoichi Kume +1 more | 1987-08-25 |