Issued Patents All Time
Showing 76–100 of 105 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6078381 | Exposure method and apparatus | — | 2000-06-20 |
| 5796467 | Scanning projection exposure method and apparatus using substrate position adjustment based on mask pattern positioin during scanning exposure | — | 1998-08-18 |
| 5777724 | Exposure amount control device | — | 1998-07-07 |
| 5770112 | Oil-in-alcohol emulsified composition | Takayuki Omura, Teruhiko Hineno, Tomiyuki Nanba, Haruo Ogawa | 1998-06-23 |
| 5698068 | Thermocompression bonding equipment | Iwao Ichikawa, Norio Kawatani, Yukio Yamada | 1997-12-16 |
| 5683790 | Multilayer ceramic parts | Makoto Kobayashi, Taro Miura, Keizou Kawamura | 1997-11-04 |
| 5627627 | Exposure control apparatus and method | — | 1997-05-06 |
| 5611878 | Method of manufacturing microwave circulator | Taro Miura, Makoto Kobayashi | 1997-03-18 |
| 5483349 | Apparatus for detecting positions of marks in projection aligner wherein an auxiliary pattern is constructed to produce a signal level that is independent of the surface condition of a substrate | — | 1996-01-09 |
| 5450045 | Multi-layer microwave circulator | Taro Miura, Makoto Kobayashi, Tadao Fujii | 1995-09-12 |
| 5439161 | Thermocompression bonding apparatus, thermocompression bonding method and process of manufacturing liquid crystal display device | Norio Kawatani, Iwao Ichikawa, Yukio Yamada | 1995-08-08 |
| 5420450 | Semiconductor device having stable breakdown voltage in wiring area | Tatsuo Yoneda | 1995-05-30 |
| 5337097 | Projection optical apparatus | Yukio Kakizaki, Tetsuo Taniguchi | 1994-08-09 |
| 5191374 | Exposure control apparatus | Junji Hazama, Tsunesaburo Uemura | 1993-03-02 |
| 5137349 | Projection-type optical apparatus | Tetsuo Taniguchi, Toshihiko Tsuji, Masato Hatasawa | 1992-08-11 |
| 5097291 | Energy amount control device | — | 1992-03-17 |
| 5089404 | Process for the transesterification of fat and oil | Wataru Matsumoto, Eiji Nakai, Toru Nezu | 1992-02-18 |
| 4982227 | Photolithographic exposure apparatus with multiple alignment modes | — | 1991-01-01 |
| 4970546 | Exposure control device | Akikazu Tanimoto, Masato Go | 1990-11-13 |
| 4956287 | Process for producing oleaginous composition | Shoji Maruzeni, Eiji Nakai, Toru Nezu | 1990-09-11 |
| 4920505 | Projection exposure apparatus | — | 1990-04-24 |
| 4855799 | Power MOS FET with carrier lifetime killer | Hirohito Tanabe, Yu Ohata, Yukiharu Miwa, Yoshihito Nakayama | 1989-08-08 |
| 4853745 | Exposure apparatus | Saburo Kamiya, Akikazu Tanimoto | 1989-08-01 |
| 4780616 | Projection optical apparatus for mask to substrate alignment | Kenji Nishi, Hidemi Kawai, Makoto Uehara | 1988-10-25 |
| 4780747 | Projection exposure apparatus | Hidemi Kawai, Hideo Mizutani | 1988-10-25 |