Issued Patents All Time
Showing 101–125 of 292 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6592661 | Method for processing wafers in a semiconductor fabrication system | Ronald A. Weimer | 2003-07-15 |
| 6589877 | Method of providing an oxide | — | 2003-07-08 |
| 6573552 | Method to form hemispherical grained polysilicon | — | 2003-06-03 |
| 6548852 | Integrated circuitry and methods of forming circuitry | Klaus Schuegraf | 2003-04-15 |
| 6541811 | Capacitor/antifuse structure having a barrier-layer electrode and improved barrier layer | Garry Mercaldi, Michael Nuttall | 2003-04-01 |
| 6528436 | Method of forming silicon nitride layer directly on HSG polysilicon | Scott DeBoer, Klaus Schuegraf, Robert K. Carstensen | 2003-03-04 |
| 6528364 | Methods to form electronic devices and methods to form a material over a semiconductive substrate | — | 2003-03-04 |
| 6526547 | Method for efficient manufacturing of integrated circuits | Lyle Breiner | 2003-02-25 |
| 6525384 | Conductor layer nitridation | Yongjun Jeff Hu, Scott DeBoer | 2003-02-25 |
| 6521507 | Selective deposition of undoped silicon film seeded in chlorine and hydride gas for a stacked capacitor | James Pan | 2003-02-18 |
| 6518121 | Boride electrodes and barriers for cell dielectrics | Husam N. Al-Shareef, Scott DeBoer, Dan Gealy | 2003-02-11 |
| 6514876 | Pre-metal dielectric rapid thermal processing for sub-micron technology | John H. Das, Dave Clarke | 2003-02-04 |
| 6511892 | Diffusion-enhanced crystallization of amorphous materials to improve surface roughness | Er-Xuan Ping | 2003-01-28 |
| 6509227 | Formation of conductive rugged silicon | Er-Xuan Ping | 2003-01-21 |
| 6486020 | High pressure reoxidation/anneal of high dielectric constant materials | Scott DeBoer | 2002-11-26 |
| 6479854 | Capacitor/antifuse structure having a barrier-layer electrode and improved barrier layer | Garry Mercaldi, Michael Nuttall | 2002-11-12 |
| 6475927 | Method of forming a semiconductor device | — | 2002-11-05 |
| 6469388 | Structure for contact formation using a silicon-germanium alloy | — | 2002-10-22 |
| 6461982 | Methods for forming a dielectric film | Scott DeBoer | 2002-10-08 |
| 6462394 | Device configured to avoid threshold voltage shift in a dielectric film | Ravi Iyer, Howard E. Rhodes | 2002-10-08 |
| 6458645 | Capacitor having tantalum oxynitride film and method for making same | Scott DeBoer, Husam N. Al-Shareef, Dan Gealy | 2002-10-01 |
| 6451661 | DRAM capacitor formulation using a double-sided electrode | Scott J. DeBoer, Husam N. Al-Shareef | 2002-09-17 |
| 6452678 | Reflectance method for evaluating the surface characteristics of opaque materials | Michael Nuttall, J. Brett Rolfson, Robert Burke | 2002-09-17 |
| 6448133 | Method to form a DRAM capacitor using low temperature reoxidation | Brett Rolfson | 2002-09-10 |
| 6441466 | Method and apparatus for reducing fixed charge in semiconductor device layers | Ravi Iyer, Howard E. Rhodes | 2002-08-27 |