Issued Patents All Time
Showing 25 most recent of 42 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7410911 | Method for stabilizing high pressure oxidation of a semiconductor device | Daniel Gealy, Dave Chapek, Scott DeBoer, Randhir P. S. Thakur | 2008-08-12 |
| 7282457 | Apparatus for stabilizing high pressure oxidation of a semiconductor device | Daniel Gealy, Dave Chapek, Scott DeBoer, Randhir P. S. Thakur | 2007-10-16 |
| 7279435 | Apparatus for stabilizing high pressure oxidation of a semiconductor device | Daniel Gealy, Dave Chapek, Scott DeBoer, Randhir P. S. Thakur | 2007-10-09 |
| 7206215 | Antifuse having tantalum oxynitride film and method for making same | Scott DeBoer, Randhir P. S. Thakur, Dan Gealy | 2007-04-17 |
| 7176079 | Method of fabricating a semiconductor device with a wet oxidation with steam process | Ronald A. Weimer, Scott DeBoer, Dan Gealy | 2007-02-13 |
| 7064052 | Method of processing a transistor gate dielectric film with stem | Ronald A. Weimer, Scott DeBoer, Dan Gealy | 2006-06-20 |
| 7038265 | Capacitor having tantalum oxynitride film and method for making same | Scott DeBoer, Randhir P. S. Thakur, Dan Gealy | 2006-05-02 |
| 7022623 | Method of fabricating a semiconductor device with a dielectric film using a wet oxidation with steam process | Ronald A. Weimer, Scott DeBoer, Dan Gealy | 2006-04-04 |
| 6955996 | Method for stabilizing high pressure oxidation of a semiconductor device | Daniel Gealy, Dave Chapek, Scott DeBoer, Randhir P. S. Thakur | 2005-10-18 |
| 6949477 | Method of fabricating a capacitive element for a semiconductor device | Ronald A. Weimer, Scott DeBoer, Dan Gealy | 2005-09-27 |
| 6943392 | Capacitors having a capacitor dielectric layer comprising a metal oxide having multiple different metals bonded with oxygen | Vishnu K. Agarwal | 2005-09-13 |
| 6872639 | Fabrication of semiconductor devices with transition metal boride films as diffusion barriers | Scott DeBoer | 2005-03-29 |
| 6864527 | Capacitor having tantalum oxynitride film and method for making same | Scott DeBoer, Randhir P. S. Thakur, Dan Gealy | 2005-03-08 |
| 6773981 | Methods of forming capacitors | Scott DeBoer, F. Daniel Gealy, Randhir P. S. Thakur | 2004-08-10 |
| 6737696 | DRAM capacitor formulation using a double-sided electrode | Scott J. DeBoer, Randhir P. S. Thakur | 2004-05-18 |
| 6720607 | Method for improving the resistance degradation of thin film capacitors | Cem Basceri | 2004-04-13 |
| 6673689 | Double layer electrode and barrier system on hemispherical grain silicon for use with high dielectric constant materials and methods for fabricating the same | Scott DeBoer, Randhir P. S. Thakur | 2004-01-06 |
| 6635547 | DRAM capacitor formulation using a double-sided electrode | Scott J. DeBoer, Randhir P. S. Thakur | 2003-10-21 |
| 6614082 | Fabrication of semiconductor devices with transition metal boride films as diffusion barriers | Scott DeBoer | 2003-09-02 |
| 6613654 | Fabrication of semiconductor devices with transition metal boride films as diffusion barriers | Scott DeBoer | 2003-09-02 |
| 6610211 | Method of processing internal surfaces of a chemical vapor deposition reactor | F. Daniel Gealy, Scott DeBoer | 2003-08-26 |
| 6596651 | Method for stabilizing high pressure oxidation of a semiconductor device | F. Daniel Gealy, Scott DeBoer, Dave Chapek, Randhir P. S. Thakur | 2003-07-22 |
| 6518121 | Boride electrodes and barriers for cell dielectrics | Scott DeBoer, Dan Gealy, Randhir P. S. Thakur | 2003-02-11 |
| 6458645 | Capacitor having tantalum oxynitride film and method for making same | Scott DeBoer, Randhir P. S. Thakur, Dan Gealy | 2002-10-01 |
| 6451661 | DRAM capacitor formulation using a double-sided electrode | Scott J. DeBoer, Randhir P. S. Thakur | 2002-09-17 |