Issued Patents All Time
Showing 51–59 of 59 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8518282 | Method of controlling etch microloading for a tungsten-containing layer | Wonchul Lee, Shenjian Liu, Bryan Pu | 2013-08-27 |
| 8440573 | Method and apparatus for pattern collapse free wet processing of semiconductor devices | Katrina Mikhaylichenko, Denis Syomin, Glenn W. Gale, Shenjian Liu, Mark Wilcoxson | 2013-05-14 |
| 8431461 | Silicon nitride dry trim without top pulldown | Qinghua Zhong, Yoshie Kimura, Tae Won Kim, Gladys So-Wan Lo, Ganesh Upadhyaya +1 more | 2013-04-30 |
| 8329051 | Method for forming stair-step structures | Hyun-Yong YU | 2012-12-11 |
| 8216388 | Extending storage time of removed plasma chamber components prior to cleaning thereof | Hong Shih, Tuochuan Huang, Raphael Casaes, Duane Outka | 2012-07-10 |
| 8124538 | Selective etch of high-k dielectric material | In Deog BAE, Wonchul Lee, Shenjian Liu | 2012-02-28 |
| 7976641 | Extending storage time of removed plasma chamber components prior to cleaning thereof | Hong Shih, Tuochuan Huang, Raphael Casaes, Duane Outka | 2011-07-12 |
| 7682979 | Phase change alloy etch | Shenjian Liu, Linda Fung-Ming Lee | 2010-03-23 |
| 7629255 | Method for reducing microloading in etching high aspect ratio structures | Shenjian Liu, Wonchul Lee, Bryan Pu | 2009-12-08 |