Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7682979 | Phase change alloy etch | Qian Fu, Shenjian Liu | 2010-03-23 |
| 7413992 | Tungsten silicide etch process with reduced etch rate micro-loading | Sok Tan, Shenjian Liu, Harmeet Singh, Sam Do Lee | 2008-08-19 |