ST

Sok Tan

Lam Research: 1 patents #1,364 of 2,128Top 65%
Overall (All Time): #3,363,567 of 4,157,543Top 85%
1
Patents All Time

Issued Patents All Time

Patent #TitleCo-InventorsDate
7413992 Tungsten silicide etch process with reduced etch rate micro-loading Shenjian Liu, Harmeet Singh, Sam Do Lee, Linda Fung-Ming Lee 2008-08-19