Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11646207 | Silicon oxide silicon nitride stack stair step etch | Ce Qin, Zhongkui Tan, Qian Fu | 2023-05-09 |
| 7413992 | Tungsten silicide etch process with reduced etch rate micro-loading | Sok Tan, Shenjian Liu, Harmeet Singh, Linda Fung-Ming Lee | 2008-08-19 |