Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12165878 | Semiconductor mask reshaping using a sacrificial layer | Zhongkui Tan, Xiaofeng Su, Hua Xiang | 2024-12-10 |
| 11646207 | Silicon oxide silicon nitride stack stair step etch | Zhongkui Tan, Qian Fu, Sam Do Lee | 2023-05-09 |
| 11037784 | Amorphous carbon layer opening process | Zhongkui Tan, Yisha Mao, Yansha Jin, Austin Casey Faucett | 2021-06-15 |
| 9741563 | Hybrid stair-step etch | Hua Xiang, Indeog Bae, Sung Jin Jung, Qian Fu, Yoko Yamaguchi | 2017-08-22 |
| RE46464 | Method for forming stair-step structures | Qian Fu, Hyun-Yong YU | 2017-07-04 |
| 8535549 | Method for forming stair-step structures | Qian Fu, Hyun-Yong YU | 2013-09-17 |
| 8066815 | Multi-workpiece processing chamber | Daniel J. Devine, Rene George, Dixit V. Desai | 2011-11-29 |
| 7276122 | Multi-workpiece processing chamber | Daniel J. Devine, Rene George, Dixit V. Desai | 2007-10-02 |