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Lam Research: 1 patents #1,364 of 2,128Top 65%
Overall (All Time): #2,961,099 of 4,157,543Top 75%
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Patent #TitleCo-InventorsDate
9741563 Hybrid stair-step etch Hua Xiang, Sung Jin Jung, Ce Qin, Qian Fu, Yoko Yamaguchi 2017-08-22