Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8440573 | Method and apparatus for pattern collapse free wet processing of semiconductor devices | Katrina Mikhaylichenko, Qian Fu, Glenn W. Gale, Shenjian Liu, Mark Wilcoxson | 2013-05-14 |
| 8324114 | Method and apparatus for silicon oxide residue removal | Katrina Mikhaylichenko | 2012-12-04 |