Issued Patents All Time
Showing 51–63 of 63 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9336996 | Plasma processing systems including side coils and methods related to the plasma processing systems | Alex Paterson | 2016-05-10 |
| 9305750 | Adjusting current ratios in inductively coupled plasma processing systems | Seyed Jafar Jafarian-Tehrani | 2016-04-05 |
| 9293353 | Faraday shield having plasma density decoupling structure between TCP coil zones | Alex Paterson, Ricky Marsh, Ying Wu, John Drewery | 2016-03-22 |
| 9059678 | TCCT match circuit for plasma etch chambers | Ricky Marsh, Alex Paterson | 2015-06-16 |
| 8742666 | Radio frequency (RF) power filters and plasma processing systems including RF power filters | Ralph Jan-Pin Lu, Fred Dennis Egley, Thomas W. Anderson, Seyed Jafar Jafarian-Tehrani, Michael Giarratano | 2014-06-03 |
| 8736175 | Current control in plasma processing systems | Seyed Jafar Jafarian-Tehrani, Arthur H. Sato, Neil Benjamin, Norman Williams | 2014-05-27 |
| 7782979 | Base-band digital pre-distortion-based method for improving efficiency of RF power amplifier | — | 2010-08-24 |
| 7776156 | Side RF coil and side heater for plasma processing apparatus | David Sun | 2010-08-17 |
| 7531061 | Gas temperature control for a plasma process | — | 2009-05-12 |
| 7186313 | Plasma chamber wall segment temperature control | Andrej Mitrovic, Paul Moroz, Steven Fink, William Jones | 2007-03-06 |
| 7091503 | Measuring plasma uniformity in-situ at wafer level | Wayne Johnson | 2006-08-15 |
| 6916401 | Adjustable segmented electrode apparatus and method | — | 2005-07-12 |
| 6811651 | Gas temperature control for a plasma process | — | 2004-11-02 |