Issued Patents All Time
Showing 26–50 of 63 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11437219 | Frequency tuning for a matchless plasma source | Yuhou Wang, Ying Wu, Alex Paterson | 2022-09-06 |
| 11342159 | RF pulsing within pulsing for semiconductor RF plasma processing | Yuhou Wang, Ying Wu, Alex Paterson | 2022-05-24 |
| 11224116 | Matchless plasma source for semiconductor wafer fabrication | Yuhou Wang, Ricky Marsh, Alex Paterson | 2022-01-11 |
| 11056321 | Metal contamination reduction in substrate processing systems with transformer coupled plasma | Neema Rastgar, Alexander Paterson | 2021-07-06 |
| 10847345 | Direct drive RF circuit for substrate processing systems | Alexander Paterson | 2020-11-24 |
| 10784083 | RF voltage sensor incorporating multiple voltage dividers for detecting RF voltages at a pickup device of a substrate support | John Drewery, Alex Paterson | 2020-09-22 |
| 10734195 | Systems and methods for transformer coupled plasma pulsing with transformer coupled capacitive tuning switching | Alex Paterson | 2020-08-04 |
| 10715095 | Radiofrequency (RF) filter for multi-frequency RF bias | Alex Paterson | 2020-07-14 |
| 10672590 | Frequency tuning for a matchless plasma source | Yuhou Wang, Ying Wu, Alex Paterson | 2020-06-02 |
| 10649006 | Cathode RF asymmetry detection probe for semiconductor RF plasma processing equipment | Alex Paterson | 2020-05-12 |
| 10638593 | Matchless plasma source for semiconductor wafer fabrication | Yuhou Wang, Ricky Marsh, Alex Paterson | 2020-04-28 |
| 10515781 | Direct drive RF circuit for substrate processing systems | Alexander Paterson | 2019-12-24 |
| 10431434 | Powered grid for plasma chamber | Alex Paterson, Richard A. Marsh, Ying Wu | 2019-10-01 |
| 10340121 | Plasma processing systems including side coils and methods related to the plasma processing systems | Alex Paterson | 2019-07-02 |
| 10332725 | Systems and methods for reversing RF current polarity at one output of a multiple output RF matching network | Arthur H. Sato, Alex Paterson | 2019-06-25 |
| 10264663 | Matchless plasma source for semiconductor wafer fabrication | Yuhou Wang, Ricky Marsh, Alex Paterson | 2019-04-16 |
| 10121641 | Large dynamic range RF voltage sensor and method for voltage mode RF bias application of plasma processing systems | John Drewery, Alex Paterson | 2018-11-06 |
| 10056231 | TCCT match circuit for plasma etch chambers | Ricky Marsh, Alex Paterson | 2018-08-21 |
| 9966236 | Powered grid for plasma chamber | Alex Paterson, Richard A. Marsh, Ying Wu | 2018-05-08 |
| 9805963 | Electrostatic chuck with thermal choke | Alex Paterson, Ying Wu, Quan Chau | 2017-10-31 |
| 9761459 | Systems and methods for reverse pulsing | Zhongkui Tan, Ying Wu, Qian Fu, Alex Paterson, John Drewery | 2017-09-12 |
| 9583357 | Systems and methods for reverse pulsing | Zhongkui Tan, Ying Wu, Qian Fu, Alex Paterson, John Drewery | 2017-02-28 |
| 9515633 | Transformer coupled capacitive tuning circuit with fast impedance switching for plasma etch chambers | Alex Paterson | 2016-12-06 |
| 9490106 | Internal Faraday shield having distributed chevron patterns and correlated positioning relative to external inner and outer TCP coil | John Drewery, Alex Paterson | 2016-11-08 |
| 9384948 | Hammerhead TCP coil support for high RF power conductor etch systems | Alex Paterson | 2016-07-05 |