Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12322579 | Metal contamination reduction in substrate processing systems with transformer coupled plasma | Maolin Long, Alexander Paterson | 2025-06-03 |
| 11056321 | Metal contamination reduction in substrate processing systems with transformer coupled plasma | Maolin Long, Alexander Paterson | 2021-07-06 |
| 10714354 | Self limiting lateral atomic layer etch | Tom A. Kamp, Michael Carl Drymon | 2020-07-14 |
| 9620376 | Self limiting lateral atomic layer etch | Tom A. Kamp, Michael Carl Drymon | 2017-04-11 |