Issued Patents All Time
Showing 76–99 of 99 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8563619 | Methods and arrangements for plasma processing system with tunable capacitance | Rajinder Dhindsa | 2013-10-22 |
| 8518209 | Apparatus for determining the endpoint of a cleaning or conditioning process in a plasma processing system | Eric A. Hudson, Douglas Keil | 2013-08-27 |
| 8485128 | Movable ground ring for a plasma processing chamber | Michael C. Kellogg, Rajinder Dhindsa | 2013-07-16 |
| 8450635 | Method and apparatus for inducing DC voltage on wafer-facing electrode | Rajinder Dhindsa, Eric A. Hudson, Andreas Fischer | 2013-05-28 |
| 8268117 | Showerhead electrodes | Greg Bettencourt, Raj Dhindsa, George Diercks, Randall A. Hardin, Jon Keihl +4 more | 2012-09-18 |
| 8262847 | Plasma-enhanced substrate processing method and apparatus | Rajinder Dhindsa, Hudson Eric, Andreas Fischer | 2012-09-11 |
| 8222156 | Method and apparatus for processing a substrate using plasma | Rajindra Dhindsa, Hudson Eric, Andreas Fischer | 2012-07-17 |
| 8222157 | Hybrid RF capacitively and inductively coupled plasma source using multifrequency RF powers and methods of use thereof | Rajinder Dhindsa, Eric A. Hudson, Andreas Fischer | 2012-07-17 |
| 8216418 | Electrode assembly and plasma processing chamber utilizing thermally conductive gasket and o-rings | Roger Patrick, Raj Dhindsa, Greg Bettencourt | 2012-07-10 |
| 8211324 | Methods and arrangements for controlling plasma processing parameters | Rajinder Dhindsa | 2012-07-03 |
| 8187413 | Electrode assembly and plasma processing chamber utilizing thermally conductive gasket | Roger Patrick, Raj Dhindsa, Greg Bettencourt | 2012-05-29 |
| 8154209 | Modulated multi-frequency processing method | Eric A. Hudson, Rajhinder Dhindsa, Andrew D. Bailey, III | 2012-04-10 |
| 8152954 | Showerhead electrode assemblies and plasma processing chambers incorporating the same | Greg Bettencourt, Raj Dhindsa, George Diercks, Randall A. Hardin, Jon Keihl +4 more | 2012-04-10 |
| 7994794 | Methods for measuring a set of electrical characteristics in a plasma | Christopher Kimball, Eric A. Hudson, Douglas Keil | 2011-08-09 |
| 7867355 | Adjustable height PIF probe | Christopher Kimball, Eric A. Hudson, Douglas Keil | 2011-01-11 |
| 7851368 | Methods and apparatus for igniting a low pressure plasma | Eric A. Hudson | 2010-12-14 |
| 7837827 | Edge ring arrangements for substrate processing | Rajinder Dhindsa | 2010-11-23 |
| 7837826 | Hybrid RF capacitively and inductively coupled plasma source using multifrequency RF powers and methods of use thereof | Rajinder Dhindsa, Eric A. Hudson, Andreas Fischer | 2010-11-23 |
| 7758764 | Methods and apparatus for substrate processing | Rajinder Dhindsa | 2010-07-20 |
| 7723994 | Plasma processing chamber with an apparatus for measuring a set of electrical characteristics in a plasma | Christopher Kimball, Eric A. Hudson, Douglas Keil | 2010-05-25 |
| 7578301 | Methods and apparatus for determining the endpoint of a cleaning or conditioning process in a plasma processing system | Eric A. Hudson, Douglas Keil | 2009-08-25 |
| 7479207 | Adjustable height PIF probe | Christopher Kimball, Eric A. Hudson, Douglas Keil | 2009-01-20 |
| 7319316 | Apparatus for measuring a set of electrical characteristics in a plasma | Christopher Kimball, Eric A. Hudson, Douglas Keil | 2008-01-15 |
| 6972524 | Plasma processing system control | Eric A. Hudson, S. M. Reza Sadjadi | 2005-12-06 |